金属-介质薄膜的制备工艺和缺陷研究
文献类型：学位论文
| 作者 | 卢宝文 |
| 学位类别 | 硕士 |
| 答辩日期 | 2009 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 徐学科 |
| 关键词 | 金属-介质薄膜 沉积速率 挡板 诱导透射滤光片 薄膜缺陷 |
| 其他题名 | Deposition technology and defects analyses of Metal-Dielectric thin films |
| 中文摘要 | 本文的工作以金属-介质薄膜的制备工艺和多腔诱导透射滤光片的缺陷为重心。从单重到多重，从理论到应用，对金属-介质薄膜进行了逐层深入的研究，主要内容包括以下几部分： 研究热蒸发金属银膜的微结构和光学性质。研究发现通常认为热蒸发金属薄膜的沉积速率越快越好的观点应该是适用于相对较低的速率上，当沉积速率过高的时候会引起蒸发源温度过高，致使银粒子易于形成较大粒子团沉积到基底上，影响了银粒子在基底上的迁移能力，导致薄膜生长过程产生晶体缺陷和结晶程度的降低，进而影响了银膜的成膜质量和光谱性能。在此基础之上，设计了可调沉积速率的真空镀膜机挡板，并实验了此挡板对热蒸发金属银膜的影响。实验证明，采用可调沉积速率挡板能有效地增强金属银膜在基片上沉积的均匀性和聚集密度。 以金属-介质薄膜中的典型代表多腔诱导透射滤光片为例，首先简述了滤光片的设计理念和制备工艺，并引出了多腔诱导透射滤光片的缺陷问题。通过观察，将缺陷分为点状缺陷和线状缺陷两大类，然后分别举例详细地分析了缺陷的形貌、元素组分，并在此基础上推断了缺陷的产生原因。最后采取了盐酸清洗工艺和改进制备工艺等措施，逐步降低了多腔诱导透射滤光片的缺陷数量。 设计制作两种特殊形状光学元件——圆锥镜和角锥棱镜的专用镀膜夹具。简单讨论了在这两种光学元件上制备银膜的制备工序，提出了一项工艺变更，有效地减少了金属银膜在特殊形状光学元件上的针孔缺陷。 |
| 英文摘要 | This thesis was focused on deposition technology of metal-dielectric coatings and defects of Multiple Cavity Induced Transmission Filters. From single cavity to multiple cavity, from theory to application, the research on metal-dielectric coatings was carried on step by step, mainly included below several parts: The microstructures and optical properties of silver thin films deposited by thermal evaporation were researched. The research showed that the traditional view said, the faster the deposition rate of metal thin films by thermal evaporation, the better coatings quality we got, was suitable at a relative low deposition rate. A very fast deposition rate would cause a high temperature deposition source which would lead to big silver particles. Big particles’ migration were low enough to induce crystal defects and a low crystallization level. Furthermore, films quality and optical properties was decreased. Based on this, a deposition rate tunable baffle plate used in vacuum coating machine was designed and made. Tests were carried out to prove the effectiveness in deposition uniformity and gather density of silver films with the baffle plate on. Multiple cavity induced transmission filters (ITF) was set as representative of metal-dielectric thin films. Conception of ITF, layers design and deposition technology were briefly introduced, which guided to our main problem—defects. Defects were mainly divided into two types: Dig and Scratch. Examples were analyzed in their depth information and element composition, and the possible geneses were inferred according to the analyses. Acid cleaning techniques and improved processes were carried out and the defect quantity was decreased step by step. Dedicated coating jigs for two special shape optical elements—Cone lens and pyramid prism were designed and prepared. Preparation details of protected silver layer deposited on the two optical elements were discussed. Pinhole-defect quantity was effectively decreased by a deposition process changed. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16419]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 卢宝文. 金属-介质薄膜的制备工艺和缺陷研究[D]. 中国科学院上海光学精密机械研究所. 2009. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。