硅片表面缺陷检测理论研究与计算机仿真
文献类型：学位论文
| 作者 | 曹楷 |
| 学位类别 | 硕士 |
| 答辩日期 | 2005 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 程兆谷 |
| 关键词 | 缺陷检测 仿真 散射 米氏理论 杨氏模型 相差模型 双入射模型 |
| 其他题名 | Calculation of light scattering from a spherical particle on silicon surface |
| 中文摘要 | 随着半导体工业的蓬勃发展，大规模集成电路的集成度越来越高，最小线宽也迅速缩小，缺陷密度对成品率的影响也显得越来越突出，因此，在半导体行业中，检测并控制缺陷是一项非常重要的工作。从长远来看，这必须要通过改善制程工艺，提高设备精密度才能得到理想的效果，而从实际生产来看，就必须要引入自动缺陷检测仪来进行检测和控制。在各种检测仪中，激光自动扫描缺陷检测方法具有非破坏性，高的检测速度，高分辨率，高度自动化等优点，在缺陷检测领域得到了广泛的应用。表面粒子的散射理论研究及计算机仿真计算方法也越来越受到重视。本论文首先回顾了Mie散射理论的推导过程，从中我们可以看到边界条件的定义，坐标系的建立，德拜势的引入，场分量的级数展开以及远场条件的化简方法。深入研究了以Mie理论和Fresnel反射公式为基础的三种表面散射模型，即杨氏模型（Young'sApproach），相差模型（PhaseDifforenceModel），双入射模型（DoubleInteractionModel）。本论文首次在表面粒子的散射理论中建立了各个坐标系之间的转化矩阵，大大简化了求解过程中复杂的坐标系变换，并推导出在任意偏振方向平面单色线偏振入射光照射下，远场空间任意点的散射光强的计算公式。以此为基础，编写MatLab程序实现了硅片表面缺陷检测的仿真计算，该程序可任意设定入射光波长、入射角度、偏振方向、散射球粒径、散射对象折射率，反射表面折射率和散射光收集角等参数。具体研究了波长0．6328林m的He一Ne光以不同偏振方向、不同角度入射，被硅片表面不同粒径大小PSL球散射的结果，以及不同取样间隔对计算结果精确度的影响。得出了一些对仪器研制有指导性的结论。最后，论文简单介绍了仪器研制情况，并对下一步的仁作提出了一些看法。 |
| 英文摘要 | With the great improvements in semiconductor industry, critical dimension becomes smaller and smaller. And the influence of defect density plays more important role in yield. Therefore, it f>: .fcecomes an important task in inspecting and controlling defect density real-time. Only defect inspector can do this when it is hard to improve the processing technic. Automotive laser-scanning inspectors are widely used in the field of defect inspection. It holds many advantages, such as non-destruction, high scanning speed and high resolution, etc. In addition, the calculation of light scattering from particles on surfaces is of interest in the simulation, development, and calibration of surface-contamination and defect-inspection instruments. We review the theory of Mie first. In this part, we show how to define the boundary conditions, how to define an appropriate system of coordinates, how to represent the field in terms of Debye's potentials, how to write the field components as series expansions, and how to get simplified formulae. The research focuses on three models: the Young's Approach, the Phase Difference Model and the Double Interaction Model, which are based on the theory of Mie and the Fresnel formulae. It is the first time that coordinates matrices are introduced to scattering theories to resolve the complicated problem of building relationship between a series of coordinates, including Cartesian systems and spherical polar coordinates. We obtained, on the basis of the models mentioned above, a solution for the diffraction of a plane, linearly polarized, monochromatic wave, of arbitrary incident angle and arbitrary degree of polarization, by a homogeneous sphere of any diameter and of any composition situated in a homogeneous medium. The solution is expressed by electric vectors in the spherical polar coordinates and is suitable for any position in the scattering space. According to the theoretical expressions, we write some programs in MatLab to calculate the intensity of the scattered wave with the input parameters, such as wavelength of the incident light, incident angle, degree of polarization, diameter and refractive index of the PSL sphere, and refractive index of the surface. Then, we discussed how serious the simulation results are affected by the density of sampling angle, the incident angle, degree of polarization and the diameter of the sphere, under the assumption that the wavelength of the incident light is 0.6328um. In the end of this paper, we show some slides of the inspector in research, and provide some opinions for the further research. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16450]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 曹楷. 硅片表面缺陷检测理论研究与计算机仿真[D]. 中国科学院上海光学精密机械研究所. 2005. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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