双频激光干涉仪实现纳米精度测量的研究
文献类型：学位论文
| 作者 | 宁志高 |
| 学位类别 | 硕士 |
| 答辩日期 | 2005 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 程兆谷 |
| 关键词 | 双频激光干涉仪 纳米测量 误差分析 |
| 其他题名 | Study of realizing nanometer precision measurment with dual-frequency Laser interferometer |
| 中文摘要 | 近年来，纳米技术的研究受到了越来越多的重视，特别是随着机械、材料、电子等工业的迅猛发展，它涉及到越来越广泛的内容，其中纳米测量技术是纳米科学的一个重要分支。现在纳米级精度的测量已经成为目前工业和科学发展中迫切需要解决的问题。本论文工作是结合上海市二期光科技研制项目"光刻机定位双频激光干涉仪"（项目批准号：022261052）相进行的。本文主要阐述了如下几方面的工作：（l）首先对双频激光干涉仪实现纳米精度测量进行了较为系统的理论研究；（2）在此基础之上，着重分析了影响测量精度的各主要误差源；（3）提出了通过光学细分提高仪器分辨率等改进措施；（4）研制了一台可实现纳米精度测量的双频激光干涉仪样机。沦文还着重分析了在共光路双频干涉仪中由激光光源的椭圆偏振化和Wollaston棱镜的安装方位角同时存在的情况下，引起的频率混叠综合误差的大小及变化规律。 |
| 英文摘要 | In recent years, more and more attention is paid to the study of nanotechnology. Especially with the rapid development of mechanical, material and electronical industries, nanotechnology has covered a lot of ground. Among them nanometrology is an important branch of nanotechnology. At present, measurement on nano level has been an important problem demanding prompt solution in the development of industry and science. This paper is based on the "R&D of a dual-frequency Laser interferometer for lithography application", which is the Optical Science & Technology Project of Shanghai Municipal Science and Technology Commission (No.022261052 ). The follows some works were be done: First, it is discussed detailedly that the dual-frequency laser interferometer realizing nanomeasurement; Then, it is analyzed especially to the influence of main error source for measuring accuracy; We proposed some improving measures, eg, optics subdivision for improving instrument resolution; In the end, we developed a prototype dual-frequency laser interferometer to realize nanomeasurement. Moreover, it is analyzed especially that the two factors existing at same time, which including elliptic polarization of laser and installation error of Wollaston prism, can cause frequency mixing errors in common path heterodyne interferometer. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16452]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 宁志高. 双频激光干涉仪实现纳米精度测量的研究[D]. 中国科学院上海光学精密机械研究所. 2005. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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