LBO晶体上薄膜制备工艺及附着力测试技术
文献类型：学位论文
| 作者 | 邓震霞 |
| 学位类别 | 硕士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 贺洪波 |
| 关键词 | LBO晶体 薄膜 各向异性 退火 附着力 |
| 其他题名 | Fabrication of optical coatings on LBO crystal and adhesion test technique |
| 中文摘要 | 全固态激光器的发展，伴随大量晶体的使用，其小型化、集成化的发展趋势，要求直接在晶体上镀制各类光学薄膜，给晶体镀膜的研究与发展提出了挑战。同时，随着全固态激光器向高功率的发展，晶体上的薄膜除了要求更好的光学性能之外，对薄膜的力学性能、抗激光损伤性能也提出了更高的要求。本文主要围绕晶体镀膜中的膜基附着力差的问题对三硼酸锂(LiB3O5，LBO)晶体上薄膜的制备工艺进行了探索性研究，并设计和建立了一套简易的薄膜附着力测量装置。 本文首先在不同取向的LBO基底上镀制了HfO2单层膜，用光度学方法计算了薄膜在400-800nm波段内折射率的色散关系，研究了晶体结构对薄膜光学性能的影响，并采用掠角X射线衍射技术表征了薄膜的微结构，发现基底结构对薄膜结构，光学性能和力学性能具有明显的影响。 采用电子束热蒸发技术，对LBO晶体上1064nm，532nm二倍频增透膜的镀制工艺进行了系统研究。首先设计和镀制了引入不同SiO2过渡层厚度的二倍频增透膜，研究了薄膜光谱性能及退火过程中热稳定性的变化规律，发现过渡层的引入对薄膜光谱性能的影响是可以控制的，而过渡层的厚度对薄膜的热稳定性有明显的影响。通过改变膜系结构，膜料及过渡层材料在LBO晶体基底上制备了一系列1064nm，532nm二倍频增透膜，分析了薄膜的光谱性能和热稳定性能的变化，确定了最佳膜系结构为高折射率材料为HfO2，且不引入任何过渡层材料的四层膜系。最后采用循环退火实验，研究了不同取向的LBO晶体上二倍频增透膜的疲劳损伤效应，发现了晶体取向对薄膜的抗疲劳损伤效应有明显的影响。 为了对薄膜附着力进行定量测量，设计和建立了一套宽量程直接引拉法薄膜附着力的测试装置，该装置利用了杠杆原理，具有测量范围广，操作方便，成本低廉的特点。本文提出该装置的具体实现方案，分析了该装置的误差来源，并提出了相应的应对措施，用该装置测试了一系列光学薄膜的附着力，得出的结果表明薄膜附着力与材料性质，沉积方法及沉积工艺有关。 |
| 英文摘要 | The development of the diode pumped laser (DPL), accompanied by popular use of a large amount of optical crystals and with its tendency of miniaturization, compactness, had brought many chances and great challenges for the research and development of coatings on crystal substrates. Meanwhile, DPL with high power put forward the higher requirement for the mechanical property and the laser induced damage threshold (LIDT) of the coatings in addition to the optical performance. In this paper, we had concentrated on the weak adhesion between films and the nonlinear optical crystal LBO and studied the coating fabrication. Besides, we had designed and established a simple adhesion-test device for coatings. Firstly, HfO2 thin films were deposited on three kinds of LBO substrates having the surfaces prepared by cutting at specified crystalline orientations. The refractive indices and the dispersion from 400nm to 800nm of the coatings were calculated with spectrophotometer methods and the influences of the crystalline structure on the optical performance of the films were investigated. The microstructure of the films was characterized by grazing X-ray diffraction technique (GXRD). It was found that the structure of the substrate influenced the structure, optical performance and mechanical properties of the films. The fabrication of frequency doubling antireflection coatings at 1064nm and 532nm on LBO substrate was systematically studied using the electron beam evaporation technique. It was started with design and preparation of the coatings with different thicknesses of SiO2 interlayer. Optical performance and thermal stability of the films were investigated and the results showed the change of the optical property with the thickness of the interlayer could be controlled and the thermal stability was collected with the thickness. A series of frequency doubling antireflection coatings on LBO crystal were prepared by varying coating stack, coating material or interlayer material and an optimal stack, which was a four-layer coating without any interlayer and with HfO2 as high-refractive material, was concluded by the analysis of optical performance and thermal stability during annealing. Finally, repeating annealing was adopted to study the fatigue damage of the coatings on LBO and an obvious effect of crystal orientations on coating performance was observed. A directly pulling method for measuring adhesion between coatings and substrates was designed and the device was realized by introducing the lever principle and characterized by a broad measurable range, operating convenience and low cost. The detailed design and manipulation were given in this paper and the error origin was also discussed with corresponding solution. Some experimental data measured by this device told that the coating-substrate adhesion was involved with material nature, preparation method or technique. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16480]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 邓震霞. LBO晶体上薄膜制备工艺及附着力测试技术[D]. 中国科学院上海光学精密机械研究所. 2007. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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