大口径光学元件检测技术研究
文献类型：学位论文
| 作者 | 闫岩 |
| 学位类别 | 硕士 |
| 答辩日期 | 2005 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 黄惠杰 |
| 关键词 | 大口径光学元件 损伤检测 像质检测 哈特曼检验法 |
| 其他题名 | Study of Large-Aperture Optical Element Detection Techniques |
| 中文摘要 | 大口径光学元件是构建现代大型高性能光学装置的基础。大口径光学元件由于其口径大、质量要求高，传统的检测技术和装置已不能满足其检测的要求，迫切需要研究适合大口径光学检测的技术与装置。本论文开展了大口径光学元件两个方面的检测技术研究：在线损伤检测和像质检测。l）在分析现有的损伤检测技术的基础上，根据大口径光学元件的特点，提出了一种大口径光学元件损伤在线检测方法，并建立了检测装置。该装置采用主动照明方式，利用内调焦望远镜接收损伤产生的后向散射光，实现对不同距离处被检光学元件表面损伤的暗场成像，进而通过分析损伤图像得到被检光学元件损伤区域的大小和性质，从而实现对大口径光学元件全口径的损伤在线检测。2）介绍了基于哈特曼检验法的多功能光学质量检测装置，该装置改进了传统哈特曼检验法中的固定式光阑结构，利用步进电机驱动光阑转动来实现对被检光学元件各个区域的分割与采样，提高了采样频率，降低了哈特曼光阑的制造难度。此外，该装置利用CCD摄像机接收子光束光斑信息，利用数据处理技术对接收到的图像进行处理，提高了检测的精度和效率，不仅能够检测大口径光学元件的几何像差，同时还能得到元件的波像差、点列图和面形偏差，为评价被检光学元件提供了多方面的检测依据。3）为克服上述多功能光学质量检测装置需要造价昂贵的大口径平行光管的缺陷，论文提出了一种新颖的连续采样的哈特曼检测装置的设计方案，该方案将小口径照明系统安装在一个二维扫描机构上，通过照明系统沿径向移动及绕被检光学元件光轴转动来实现对被检光学元件全口径、高频率的采样，降低了照明系统设计与制造的难度，大大减少了成本。利用大口径光学元件损伤在线检测装置对受损钦玻璃平板进行了损伤检测实验研究，观测到了钦玻璃平板表面裂纹、内部自聚焦丝及表面膜层损伤。利用多功能光学质量检测装置对大口径非球面聚焦镜和平板的像质进行了检测，检测到了环带球差，检测结果与理论值具有很好的一致性。初步证明了本装置的可行性。 |
| 英文摘要 | The large-aperture optical element is the base of the high-performance optical apparatus. However, many properties of the optical element with large aperture and high performance can not been detected by traditional optical detection methods up to now. As a result, the study of large-aperture optical element detection techniques and apparatuses is in need. This paper concentrates on the researches in two aspects: on-line damage detection and image quality detection. On the base of the current damage detection technology, a new apparatus for on-line damage detection of lager-aperture optical elements is presented and developed according to the characteristics of the elements. This apparatus consists its own illumination system, receives the back scattering light from the damage by internal focusing telescope, and gets the bright image of the damage in the detected optical element at different distance. Through analyzing the damage image, the apparatus gets the dimension and property of the damage, and realizes the on-line detection of the lager-aperture optical element within the full aperture. A multi-function optical quality detecting apparatus based on the Hartmann principle is introduced. This apparatus improves the traditional fixed mechanism of Hartmann screen, and uses a stepper motor to drive the screen in order to sample the different local areas of the optical element. This approach improves the sampling frequency and lowers the difficulty of the Hartmann screen's manufacture. In addition, this apparatus records the spot image by a CCD camera, and processes the image with the help of the data processing program. The corresponding effects are increasingly accurate and efficient, and getting much more parameters such as wave aberration, geometry aberration, spot diagram and surface aberration. This thesis also introduces a method for continuous sampling Hartmann device, which fixes the small-aperture illumination system on the 2-D scanning mechanism. Through the illumination system moving along the radius and rotating along the axis of the optical element, the device realizes the whole-aperture and high efficient sampling. This new apparatus decreases the difficulty of the illumination system's design and fabrication, and reduces the cost. The defects of an Nd plane plate and a window glass plate are detected by the on-line damage detection apparatus for the large-aperture optical element. The flaw, film damage and self-focusing filament are observed. The image quality of an aspheric focusing lens and a plane plate is detected by the multi-function optical quality detection apparatus. Spherical aberration obtained is consistent with the theoretical value, which proves the practicability of this apparatus. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16501]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 闫岩. 大口径光学元件检测技术研究[D]. 中国科学院上海光学精密机械研究所. 2005. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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