准分子激光光束均匀性及线宽压缩研究
文献类型：学位论文
| 作者 | 李红霞 |
| 学位类别 | 硕士 |
| 答辩日期 | 2004 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 楼祺洪 |
| 关键词 | 准分子激光 光束均匀性 线宽压缩 |
| 其他题名 | Research on beam uniformity and spectral narrowing of excimer laser |
| 中文摘要 | 本论文主要是研究准分子激光的光束均匀性及线宽压缩，具体内容包括准分子激光的光束均匀性实验和线宽压缩实验。准分子激光具有波民短、脉冲功率密度高、脉宽窄及弱相干性等优点，在半导体工艺及微电子微光学工业领域中具有广泛的应用前景。为了更好的满足其应用要求对其输出光束质量进行改善是很有必要的。第1章综述了准分子激光器的工作原理，对各种改善准分子激光输出光束均匀性的方法和线宽压缩方法进行了概述。详细讨论了各种均匀方法的工作原理及其改善效果和优缺点；介绍了纵模选择的思想及方法和各种通过在腔内添加色散元件进行线宽压缩方法的原理。第二章主要研究了对3O8nmXeCI准分子激光器输出光束均匀性的改善问题。首先研究了雕分子激光器本身充气气体混合比例对输出光束均匀性的影响，并通过实验得到了最佳混合气体比例，在此比例下得到了均匀性最好的原始输出光斑；在最佳输出光束均匀性的基础上研究了各种均匀器对准分了激光光束质量的改善，分析了各种均匀群的工作原理，应用于308nmXeCl准分子激光，均匀改善后的光强起伏小于士2％，并对各种均应器的改善效果及优缺点作了比较；设计了一种新型的梯形棱镜均匀器，利用其改善准分子激光器输出光束强度的分布，起伏优于4％；最后，在利用这些均匀器对光束均匀书丝改善的基础上，具体讨论了衡量光束均匀性的各项指标及其适用范围，为各种应用提供了参考价值。第三章主要研究了各利1准分子激光线宽压缩方法。首先介绍了各种在腔内添加色散元件对线宽进行压缩方法的工作原理，分析了各种方法的优缺点及各自的适用范围；理论上推导了标准具压缩线宽的原理及川相、准具照相法测量线宽的方法，讨论了标准具本身构造系数对测量线宽下限的影响，并应用于308nmXeCI难分子激光，原始线宽实验结果与实际光谱线宽相符，且输出光束压缩线宽达到了pm量级。 |
| 英文摘要 | Beam uniformity and spectral narrowing of excimer laser has been studied in this thesis, which includes two parts,one is the research on the beam uniformity of the excimer laser, and the other is the research on the spectral narrowing of the excimer. In the first chapter,the operating principle of excimer laser is reviewed. The working principle, improving effectiveness, merits and drawbacks of various beam uniformity methods are discussed in detail. The idea of mode selecting and the principle of spectral narrowing through adding mode-selecting elements in laser cavity are introduced. In the second chapter, the improving of 308nm XeCl excimer laser beam uniformity is investigated in emphasis. First the effect of gas mixture ratio on the outputting beam uniformity of excimer laser is studied, by means of experiment the optimum gas mixture ratio is obtained,and the best original beam uniformity is achieved in this gas mixture; Based on the best original beam uniformity, analyses the working principle of various homogenizer, the beam uniformity of 3O8nm XeCl excimer laser can be reduced to less than ±2% by using homogenizer. A norval trapezoid prism homogenizer is designed,the beam uniformity of 4% is obtained by using this norval homogenizer with low cast. In the end, the evaluating norm of excimer laser beam uniformity and their applicability are analysed. In the third chapter, various techniques and their characteristics for use in spectral narrowing of excimer laser are described. The principle of spectral narrowing using a Fabry-Perot etalon and the method of line width measuring are deduced for 308nm XeCl excimer laser,the narrowing line width of output beam reachs pm magnitude. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16543]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 李红霞. 准分子激光光束均匀性及线宽压缩研究[D]. 中国科学院上海光学精密机械研究所. 2004. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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