光学薄膜的优化设计和抗激光损伤特性研究
文献类型：学位论文
| 作者 | 姚李英 |
| 学位类别 | 硕士 |
| 答辩日期 | 2002 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 邵建达 |
| 关键词 | 光学薄膜 滤光片 偏振分光镜 计算机辅助设计 |
| 其他题名 | Design and performance of laser-induced damage of optical thin films |
| 中文摘要 | 该论文的工作主要集中在以下几个方面:1.该文围绕着光学薄膜的自动设计,从基本原理的角度对8种优化方法和5种自动合成方法进行了比较,总结出了他们各自的优点和缺点.在此基础上,运用Needle和Tunneling方法,设计出了应用于色度计的,在可见光范围透过率曲线为三角形的特种滤光片.2.设计出了半宽度69nm,通带波纹度<1%,峰值透过率95.1%,截止宽度50nm的8腔带通滤光片,对该滤光片做了驻波场和温度场分析、厚度误差分析以及入射角的改变对膜系特性影响的分析.3.运用Tschbyshev多项式变换法设计出了波纹<1%,半宽度=10%,峰值透过率>99%,矩形度非常好的9腔的滤光片.4.用1064nm、200μs的自由脉冲激光器对双腔硬膜带通滤光片进行了抗激光特性的研究.并对该滤光片的吸收进行了实际测量.损伤的机理是:由于内部驻波场的存在使得内部的吸收特别大,所以在强激光脉冲的作用下,出现热破坏,即内部被烧熔;由于内部烧熔而产生强大的蒸汽压力,使得样品表面产生破斑;同时由于样品本身采用的是由ZrO<,2>/SiO<,2>制备的硬膜滤光片,样品的熔点高、强度大,导致破坏区边缘出现的破斑不规则;又因为膜层内部的结合力大于膜层间的结合力,导致样品表层呈现层状结构.5.提出了一种采用两对或多对迈克尼尔对以及多个中心波长的λ/4膜堆组合来设计宽带宽角偏振分光镜的新型的设计方法,按该设计方法制备出的偏振分光镜在420nm～670nm的波段范围内,在41.34°～48.66°入射角范围内,有T<,p>>85%,T<,p>:T<,s>>1000:1.实验证明该文中介绍的设计方法对制备投影显示用的偏振分光镜薄膜具有实用意义. |
| 英文摘要 | The thesis focused on practical design of a couple of thin film optical filters and PBS coatings, and investigated performance of laser-induced damage of a 2-cavity filter. The topics are related to the demand of the modern optical sciences and technology, which is pushing the filter to become one with more complicated specifications than ever. Meanwhile the advancement of the deposition and control technique leads to minimizing the gap of "the ideal theoretical design performance" and "practical performance". This situation makes the research of the thin film optical filters face to the increasing demand of seeking more effective design and more stability performance both for environment and laser irradiation. The basic principles of 8 different refinement methods and 5 synthesis methods are discussed respectively. Then a filter with a trigonal transmittance curve in visible band is designed with Needle method and Tunneling method. An 8-cavity filter with HBW at 10% and ripple <1% is designed with a 95.1% peak transmittance. Its EFI and TFI and performance diversification induced by incidence angle and thickness error are analyzed. A 9-cavity filter with good rectangle performance is synthesized with HBW at 10%, ripple <1% and peak transmittance larger than 99% using Tschbyshev polynomial method. Laser induced damage of a 2-Cavity ZrO2/SiO2 filters under an irradiation of the 1064nm, 200 s free pulse YAG laser. The absorption of the filter is measured with surface thermal lensing method and the threshold is determined. The process of laser-induced damage is described and analyzed, and the mechanism of the damage is briefly discussed according to the appearance of the damaged spot. A new method is described for the design of the polarization beam splitter to meet the requirement of wideband and large range incidence angle acceptance. Multiple Macneille Pairs are used and multiple central wavelength for A /4 layer stacks combination are adopted in the design. The experimental results illustrated that the design method is practicable. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16565]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 姚李英. 光学薄膜的优化设计和抗激光损伤特性研究[D]. 中国科学院上海光学精密机械研究所. 2002. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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