溶胶-凝胶多孔二氧化硅基减反膜性能研究
文献类型：学位论文
| 作者 | 李海元 |
| 学位类别 | 硕士 |
| 答辩日期 | 2005 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 唐永兴 |
| 关键词 | 济胶－凝胶 二氧化硅 减反膜 氨处理 稳定性 疏水性 |
| 其他题名 | Study on the performance of porous Silica Antireflective Coatings Prepared by Sol-Gel Processing |
| 中文摘要 | 采用溶胶－凝胶法在光学元件表面上涂制薄膜已得到广泛应用，其中薄膜的制备及其性能研究是重要内容。本论文毛要围绕高激光损伤阈值二氧化硅减反膜的制备及其性能变化规律展开研究。论文第一章综述性一地介绍了溶胶一凝胶技术的原理及其应用，着重介绍了溶胶一凝）佼法制备薄膜的技术，并讨论了溶胶一凝胶薄膜的广一泛应用前景。详细介绍了L日内外在高功率激光系统溶胶一凝胶膜层的不升究壮况，溶胶一凝胶多孔二氧化硅膜层具有很好的减反效果：涂膜后光学元件的单波长透过率稳定在99．5％左右；多孔二氧化硅膜层具有高的激光破坏阈值，Kg／石英玻璃元件单层减反膜：15一20J／cm2，1053nm／Ins。论文第一章1砚要研究提高膜层的强度。溶胶一凝胶二氧化硅减反膜经氨处理强化后，增强了膜层内Si-O-Si网络结构，提高了膜层的强度；氨处理强化）Ju）公的过程伴随着膜层厚度的变薄，而对膜层的高减反性能无影响；氮处理前后膜层的表面粗糙度基本不变；强化处理后膜层的高的激光破坏阈值亦基木不变。多孔SiO2膜层结构中有许多Si一OH亲水集团，光学透过率受环境相对温度的彩响很大。膜层稳定性对于激光器能否长期稳定使川极为重要。论文第三章首先的采用氨气和六甲基二硅氮烷（HMDS）气氛下热处理膜层。处理后生成Si-O-Si(CH3)3非极性疏水集团，膜层的疏水性大大提高，疏水性的提高增强了膜层的透过率稳定性。论文第四章探索研究掺入有机硅提高膜层的稳定性。向膜层中掺入有机硅，添加疏水集团，提高膜层的疏水性，增强膜层的透过率稳定性。在胶体中掺入有机硅，膜层中加入了Si-CH3疏水集团，膜层的疏水性大大提高；当Si-CH3与二氧化硅悬胶体中的Si的摩尔比为1/5.7时，即Si-CH3含量为0.35%wt时的二氧化硅膜层，其减反效果好，可以使基频和二倍频激光减少反射损失6.5-7.5%，疏水性也高：膜层的接触角为104。大幅度提高了膜层的透过率稳定性，延长了膜层的寿命。 |
| 英文摘要 | Sol-gel coatings have already got the extensive application in the optical component, and the study on the preparation procedures and properties of the sol-gel thin films is an important research content. The main content in this dissertation is the study of the preparation and performance of high laser damage threshold porous silica antireflective ( AR ) coatings. The principle and some applications of sol-gel technique are reviewed in chapter one. And the technology of sol-gel coatings is emphasized in detail. The lower refractive index of porous coatings make porous silica AR coatings have high transmission peak value(99.5 %). The porous silica AR coating has high laser damage threshold. The laser damage threshold of single layer silica AR coatings on K9 or quartz glass is 15-20 J/cm at 1053nm/lns. To strengthen sol-gel antireflective coatings has been studied in chapter Iwo. The adhesion of coatings on optical substrates has been improved by ammonia treatment, and the Si-O-Si net structure has been strengthened. The performance of high transmission, high laser damage threshold, is remained. And the morphology of surface of antireneclive coatings after strengthened is smooth. The transmission of coatings is correlative with environment relative humidity, because there is much of Si-OH polar hydrophilic groups on AR coatings surface. Coalings stability is very important to laser's stable use for a long time. To improve coalings stability by the treatment with ammonia and hexamethyl-disilazane (HMDS) is studied in chapter three. By the treatment with ammonia and 1IMDS. Si-O-Si(CH3)3 non-polar hydrophobic groups appear on coatings surface. The hydrophobia of the coating is much enhanced, and the transmission stability of coatings is increased greatly. A new method dash with organic silica to improve coatings stability is designed ia chapter four. The aim of the experiment is to add hydrophobic groups, enhance the hydrophobic performance and improve the stability of the films. Si-CH3 non-polar hydrophobic groups appear on the coating surface through dash with organic silica, causing hydrophobic performance, thus the stability and life of AR coating are improved greatly. This is very important for coating to use in laser System. When the content of organic silica (Si-CHj) is 0.35 %wt, the transmission of coatings is high ,and the performance of high laser damage threshold is not affected. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16576]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 李海元. 溶胶-凝胶多孔二氧化硅基减反膜性能研究[D]. 中国科学院上海光学精密机械研究所. 2005. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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