纳米分辨率微振动实时干涉测量技术的研究
文献类型：学位论文
| 作者 | 宋松 |
| 学位类别 | 硕士 |
| 答辩日期 | 2001 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 王向朝 |
| 关键词 | 实时测量 干涉仪 半导体激光器 正弦相位调制 |
| 中文摘要 | 光学干涉测量是一种重要的非接触式无损测量技术，它的主要特点是高精度、高灵敏度、结构简单、稳定性好及易于实现等，因而得到了广泛的应用。其中，对物体的微振动实现纳米分辨率实时测量在MEMS技术等领域有着重要的意义。目前常用的一些光学干涉实时测量方法存在着难于实现纳米分辨率测量、结构相对复杂等问题。本论文以正弦相位调制技术为基础，提出了半导体激光正弦相位调制实时干涉测量技术。在一般的正弦相位调制干涉仪中，干涉信号中引入了一个正弦调制的相位项，进行傅里叶分析后得到物体的位移，由于需要用计算机处理数据，不能实现实时测量。本论文所提出的实验方案中，对半导体激光器直接输入正弦调制电流，对干涉信号的相位进行调制。利用电路从干涉信号中获得与被测物体位移相关的相位变化，从而实时得到物的位移，分辨率达到纳米。首先提出一种开环式半导体激光微振动实时干涉测量系统，该系统结构紧凑简单，但是随着微振动振幅的增加，测量误差变大。同步相位检测式测量系统克服了此缺点，但是测量范围较小。反馈式测量系统可以大幅度增加测量范围，而且大大降低了外界干扰造成的测量误 差。文中给出了这三种测量系统的原理、实验装置以实验结果，对造成测量误差的原因进行了分析。 |
| 英文摘要 | Optical interferometry is an important method for noncontact and nondestructive measurements, which is easy to be realized and widely used. It has many advantages: high accuracy, high sensitivity, simplicity in construction, stabilization, and so on. Real-time measurements of minute vibration with a nanometer resolution are very important in many regions, such as micro-electromechanical system and information technology. The real-time interferometric measurement techniques reported before have the disadvantages of low resolution and relatively complicate construction. Based on sinusoidal phase-modulating (SPM) interferometry, a laser diode (LD) real-time interferometry for measurement of minute vibration with a nanometer resolution is developed in this paper. In a SPM interferometer, sinusoidal modulating-phase is introduced in interference signal. It takes time to obtain the object's displacement because it is necessary to calculate a Fourier transform of the interference signal with a computer. This method is time consuming and thus cannot meet the need in real-time measurements. We propose an experiment scheme that phase in interference signal is modulated by varying the injection current of LD. We realize the real-time signal processing for vibration measurement by the use of electrical circuit instead of computer. At first we design an open-loop LD real-time interferometer with a compact construction, which can measure minute vibration. In this interferometer, measurement errors increase with amplitude. In order to resolve this problem, system using synchronous phase detection is presented. However, the system still suffers from the limit of low measurable range. We employ a feedback control circuit in interferometric measurement system, and measurement range is expanded and the external disturbances are eliminated. The principle is described. Experimental results of three measuring systems are given, and error sources are analyzed. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16585]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 宋松. 纳米分辨率微振动实时干涉测量技术的研究[D]. 中国科学院上海光学精密机械研究所. 2001. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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