非均匀薄膜的光学特性分析
文献类型：学位论文
| 作者 | 沈自才 |
| 学位类别 | 硕士 |
| 答辩日期 | 2005 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 王英剑 |
| 关键词 | 非均匀 渐变折射率 光学薄膜 共蒸 反应磁控溅射 |
| 其他题名 | The optical property study of inhomogeneous coatings |
| 中文摘要 | 非均匀薄膜，又被称为渐变折射率薄膜。本文在对非均匀薄膜的研究历史、光学理论、光学设计回顾的基础上，进行了以下两个方面的研究：一是研究了非均匀性对薄膜光学性能的影响；二是对具有一定变化规律的非均匀薄膜进行了理论分析和实验研究。1、研究了非均匀性对传统光学薄膜性能的影响。在论文中首先对光学薄膜中可能产生非均匀性的因素进行了探讨，计算分析了非均匀性对光学薄膜性能的影响；然后在实验的基础上分析了非均匀性存在的原因，提出了避免或者减小非均匀性的方法；之后给出了非均匀性过渡层的过渡模型并编写了一个简单的非均匀性分析程序。研究认为，沉积参数的变化和基底的表面特性是引起薄膜非均匀性的主要原因，在基底与薄膜的界面处存在一个近似的线性过渡层。为此我们可以采取以下措施来尽量减小薄膜的非均匀性：一是保持沉积参数的稳定性，尤其是薄膜沉积初期，对蒸发膜料要充分预熔；二是尽量选用面形较好的基片；三是要尽量将基片清洗干净。2、研究了双源共蒸法制备非均匀薄膜的中的一系列问题。介绍了双源共蒸法制备非均匀薄膜的制备方法；利用紧密堆积原理，探讨了双源共蒸法制备非均匀薄膜的模型；研究了非均匀薄膜的折射率与两种膜料的折射率的关系；研究了两种膜料的沉积速率与非均匀薄膜的沉积速率和折射率分布规律的关系。在以上研究的基础上，研究了双源线性共蒸法制备的非均匀薄膜的光学特性，对单周期的正变和负变两种情况，不同规律的多周期非均匀薄膜的光学特性进行了系统分析，并对对线性共蒸法制备非均匀薄膜过程中可能存在的折射率极值误差、变化规律误差以及厚度误差进行了分析。研究发现，线性双源共蒸法制备的非均匀薄膜可以用作长波通滤光片、短波通滤光片和负滤光片。3、初步探讨了反应磁控溅射法制备非均匀薄膜的理论问题。对反应磁控溅射法制备渐变折射率薄膜的制备方法和制备的过程模型进行了初步研究，分析了薄膜的折射率与溅射过程中反应气体的分压之间的关系。在以上基础上，实验探讨了折射率与反应气体分压比的关系，实验发现：随着反应气体分压比的增大，薄膜的折射率呈现指数递减的关系，同时薄膜的颜色随着反应气体分月、L匕的增大从深黄色逐渐变为透明色；通过XRD实验分析发现少｝，没有品1体生成，说明制备的薄膜均是无定形的薄膜。 |
| 英文摘要 | Inhomogeneous coatings are also called graded index coatings. Some reviews are given to the inhomogeneous coatings, which include research history, optical theory and optical design, etc, and then we give such following two studies on the inhomogeneous coatings: one is the influence of inhomogeneity on the properties of tradition optical coatings; the other is the theoretical and experimental analysis to graded index coatings. Firstly, the influence of inhomogeneity on the optical coatings was studied in this paper. In the discussion, the factors which bring forth inhomogeneities are studied firstly; then some different inhomogeneities are supposed existed in the course of deposition, we studied the influence of inhomogeneity on the optical properties of coatings. And a single layer and AR coatings are prepared and fitted. From theoretical analysis and experiment, following conclusions can be got: the unstable of deposition parameters is the origin of inhomogeneity, especially in the beginning of deposition, and there is a linear transition layer between substrate and coatings. After that, a transition model is put forward and a Inhomogeneity Analysis Procedure is wrote to analyze the influence of inhomogeneity on tradition optical coatings. In order to decrease the inhomogeneity of coatings, such following measures should be adopted: the first is keeping the stability of deposition parameters, the second is choice preferable substrate, and the third is washing the substrate clear. Secondly, some researches are given to the graded index coatings prepared by co-evaporation deposition. In this part, we performed such following researches: preparation method; the aaccumulation model of two materials, and the relationship between the deposition rate of coatings and two coating materials; the relationship between refractive index and dielectric constant of different materials; the relationship of refractive index of graded index coatings and the deposition rates of two materials; the optical characteristics of inhomogeneous coatings prepared by linear co-evaporation deposition, and some possible error in the course of preparation. All these will establish theoretical foundation for the preparation of graded index coatings prepared by double-source co-evaporation. And we can got such following results: the graded index coatings prepared by double-source linear co-evaporation can be used as different band-pass filters. Thirdly, we studied the preparation of graded index coatings by reactive magnetron sputtering. In this section, a practical modeling is proposed for gradient-index coatings which are prepared by reactive magnetron sputtering, the relationship between coating refractive index and partial pressure of reactive gas is discussed firstly, and then, the methods how to control the variety of partial-pressure of reactive gas and how to get an ideal gradient coatings are discussed on the condition of special deposition parameters. Then some experiments are performed and such results can be got: As the increase of partial-pressure of reactive gas, the index of coatings exponently descrease. The color of the coatings turns light as the increase of partial-pressure of reactive gas. From XRD, it is know that there is not crystal formatted in the coatings and they are all amorphous. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16589]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 沈自才. 非均匀薄膜的光学特性分析[D]. 中国科学院上海光学精密机械研究所. 2005. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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