扫描近场光学显微镜光纤探针的制作和音叉探测系统的研究
文献类型：学位论文
| 作者 | 罗继全 |
| 学位类别 | 硕士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 徐文东 |
| 关键词 | 扫描近场光学显微镜 自动腐蚀光纤探针技术 光纤探针 音叉系统 弱信号处理电路 |
| 其他题名 | Fabrication of fiber tip and study on tuning fork system for scanning near-field optical microscope |
| 中文摘要 | 本文针对亚微米光纤探针在扫描近场光学显微镜中的重要性，设计了一套制备光纤探针的实验装置。为了能制备出大锥角、短锥体长度的光纤探针，基于动态腐蚀制备光纤探针等研究方法，我们建立了自动腐蚀光纤探针的实验装置，成功制备出较好的光纤探针。使用该装置制备光纤探针具有以下优点：(1).实验装置简单，操作简便；(2).制备探针的重复性好；(3).制备光纤探针实验条件的可调范围大，可以根据需要，灵活的设置实验条件，以制备不同结构的光纤探针。利用该实验装置，我们研究了光纤探针结构一致性的实验，获得了较好的实验结果，从而肯定了自动腐蚀光纤探针装置可以较大程度保证制备光纤探针实验条件的一致性，最终可获得高重复性的探针结构。同时，我们也研究了影响光纤探针结构的主要因素，例如光纤的移动速度、光纤插入酸溶液的深度以及光纤插入溶液的垂直度，从获得的显微镜图像可以看出，这些因素对探针的结构有不同程度的影响。使用此装置获得的光纤探针，其孔径可以达到100nm以下，锥体角可以达到700。 另外，本文还致力于研究扫描近场光学显微镜中用于控制针尖与样品距离的音叉探测系统。扫描近场光学显微镜日益成为纳米检测中一种重要的手段，而使用非光学方法进行针尖样品之间距离控制已成为仪器实现的关键。使用石英音叉作为驱动光纤探针的力敏感器由于具有灵敏度高，元件结构简单，制造成本低等优点，成为非光学控制微距离的一种重要方法。本文首先研究了粘有光纤探针的音叉系统的理论模型，接着分析了影响石英音叉系统Q值的主要因素，同时建立了检测音叉系统Q值的实验装置。由于目前用于扫描近场光学显微镜的音叉系统的模式主要是剪切力模式和轻敲模式，所以我们对这两种模式下光纤探针的各种粘贴方式进行了实验研究。从实验结果来看，光纤的粘贴方式对音叉系统的Q值影响很大。剪切力模式下，在音叉臂侧面中部正交粘贴光纤时可以获得较高的音叉系统Q值，Q值高达4000；轻敲模式下，在音叉臂正面中部正交粘贴光纤也可以获得较高的音叉系统Q值，Q值高达2800。如果把探针尾端的光纤折断，则可以获得更高的Q值，从我们获得的实验结果看，Q值可以高达6550。 最后，本文还针对扫描近场光学显微镜中的收集光路模块进行了研究，设计出收集光路模块中弱信号的处理电路。该弱信号处理电路主要采用了调制解调方法，由几个模块组成。我们在实验板上进行了该电路的调试，获得了初步的实验结果。此外还对实验室现有的扫描近场光学显微镜进行了技术细节的分析，主要是该系统的反馈机制和实验操作细节。 |
| 英文摘要 | In this paper, because of the importance of sub-micron optical fiber probe in scanning near-field optical microscope, we design a suit of experimental device for fabricating optical fiber probe. To produce large cone angle, short length of optical fiber probe, based on dynamic corrosion methods for producing optical fiber probe, we design an automatic corrosion device for fabricating fiber probe and we get a better result. Using the equipment for fabricating fiber tip has the following advantages. Firstly, the experimental equipment is simple and easy to operate. Secondly, we can obtain high reproducibility probe. Thirdly, the regulatory scope of the experimental conditions is wide and experimental conditions can be set up flexibly which can use for fabricating different probes. Using the experimental device, we have studied the consistency experiment of the probe structure, and get a better result. We ensure this device can assure the consistency of the experimental conditions for producing optical fiber tips. Besides, we also studied the main factors affecting the fiber probe, for example, the speed of optical fiber, the depth of the fiber inserted into the acid solution and the verticality of the fiber. From the microscope images, we discover that these factors have greatly affected the structure of the probe. Utilizing the device, we get the probe which its diameter is less than 100nm and its cone angle can reach 70 degree. In addition, this paper also studies the tuning fork system which is used to control the distance between the tip and sample for scanning near-field optical microscope. Scanning near-field optical microscope has increasingly become an important tool for detection of nanotechnology. And the non-optical method for controlling the tip-sample distance has become a key technique. Using tuning fork as a driving force sensor for probe due to high sensitivity, low cost of manufacture, simple instrument so on, has become an important method. In this paper we study the theoretical model of the tuning fork system sticked a fiber probe, analyze the principal factors which impact the Q value, and establish the detecting device which is used to detect the Q value of tuning fork system. The working mode of tuning fork system in scanning near-field optical microscope includes shear force mode and tapping mode, so we study various adhesive method of fiber probe in these two models. From the experimental results, the fiber paste approach to the tuning fork influences the Q value significantly. In shear force mode, the way that the fiber tip pastes in the center of the tuning fork arm can get high Q value which can reach 4000. In tapping mode, the way that the fiber tip pastes in the center of the tuning fork arm can get high Q value which can reach 2800. If the tail end of the fiber probe is snapped, the Q value would be higher. From the experimental results, we obtained the Q value which can be as high as 6550. Finally, we also study the collection of optical information for scanning near-field optical microscope, and design the weak signal processing circuit using in the optical information collection. The weak signal processing circuit mainly includes the modulation, demodulation and amplifier circuit. We do some experiments in the experimental circuit board and get some preliminary results. In addition, using the existing scanning near-field optical microscope, we study technical details of the device which involve the feedback mechanism and the experimental details. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16612]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 罗继全. 扫描近场光学显微镜光纤探针的制作和音叉探测系统的研究[D]. 中国科学院上海光学精密机械研究所. 2007. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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