光学薄膜在线监控技术
文献类型：学位论文
| 作者 | 高慧慧 |
| 学位类别 | 硕士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 易葵 |
| 关键词 | 光学薄膜 在线光谱测量 CCD 堆积密度 波长漂移 小波分析方法 |
| 其他题名 | Technology of on-line monitoring of optical thin-film |
| 中文摘要 | 光学薄膜的制备不仅需要长期的工艺经验积累，而且对设备配置及稳定性也有较高要求。光学薄膜制备一般在真空室内进行，实际镀膜效果一般只有放气后进行光谱测量方可得知。因此，针对国产电子束镀膜设备易受环境干扰或人为因素引起重复性和成品率不够理想的状况，本论文在中心光学膜厚自动监控系统的基础上，开展了薄膜光谱在线监控技术的研究。目的在于通过已镀膜系的实时光谱测量来指导后继镀膜过程，提高薄膜制备的成品率和重复性。 光学薄膜在线监控技术主要包括两个方面的内容，一方面是薄膜光谱的在线测量，使得镀膜效果实时可知；另一方面是根据实时测量的光谱对镀膜过程过行指导，涉及到真空室内外环境不同时薄膜材料相关参数（如折射率、堆积密度等）的获得，以及对真空室内外环境不同时波长漂移现象的研究。 薄膜光谱的在线测量方面，首先建立了光学薄膜在线光谱扫描系统，结合软硬件介绍了光学薄膜在线光谱扫描系统的工作原理，分析了该系统中引起测量误差的主要原因并提出了相应的改进方法。然后建立了线阵CCD宽光谱测量系统的实验平台，描述了系统的软硬件构成以及CCD工作状态调节原理。分析了引起测量误差的主要因素，认为引起测量误差最主要的原因是CCD输出模拟信号的调理电路。 薄膜材料参数及波长漂移方面，通过单层膜实验及光学薄膜光谱在线测量系统得到了常用膜料真空室内外环境不同时的折射率，分析了薄膜吸潮过程引起的折射率变化。根据真空室内外环境不同时物理厚度不变的原理，引入矢量法分析真空室内外环境不同时薄膜中心波长的关系，并由真空室内的中心波长预测真空室外的中心波长，实验取得较好的效果。 最后，对整个论文的工作进行了总结，并且提出了今后改进的思路和发展的方向。 |
| 英文摘要 | Preparation of optical thin films requires not only a long-term technology accumulation but also a high stability equipment configuration. Usually，optical thin films are prepared in the vacuum chamber. The coating effect can only be detected by spectrum measurement after deposition. However, domestic electron beam coating equipments are susceptible to environmental interference, thus causing reproducibility is not ideal enough. Accordingly，this paper conducted on-line film spectrum of measurement technology on the basis of the automatic system monitoring thickness of optical coatings. This paper aimed at the adoption of the coating real-time spectrum measurements to guide subsequent coating process and enhance the reproducibility of optical thin-film manufacture. On-line monitoring of optical thin film technology including two main aspects, one is the on-line film spectrum measurement, making the coating effect immediate known; the other is guiding of coating process based on real-time spectrum measurement, which is related to the acquisition of thin film materials related parameters (such as refractive index, packing density, etc.) inside & outside vacuum chamber, and the inside & outside vacuum chamber wavelength drift studies. In the aspect of the on-line film spectrum measurement, the optical thin-film spectrum on-line measurement system was established at first. Its principle was introduced both in hardware and software. Infecting factors and improvement methods to the system's accuracy were analyzed too. Then a platform of linear CCD spectrometer was established. Its principle was introduced both in hardware and software. And the CCD work state regulation principles and methods were introduced. Analysis shows that the measurement error mostly caused by the CCD analog signal output conditioning circuit. In the aspect of guiding coating process, refractive indices inside and outside vacuum chamber where the envoriment is different were gained by monolayer experiments and optical thin-film spectrum on-line measurement system. The refractive index change induced by moisture absorption process was analyzed too. Based on the principle that thin-film physical thickness doesn’t change inside and outside vacuum chamber，the vector method was introduced to interpret the relation between thin-film center wavelength inside and outside vacuum chamber where the envoriment is different, by which center wavelength of the coatings outside vacuum chamber can be estimated. And experiment results accord well with the estimations. At last，the summary of this paper and advice for future work are presented. Key words：Optical thin-film; optical thin-film spectrum on-line measurement system; CCD; Packing density; Wavelength drift; Wavelet transform |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16617]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 高慧慧. 光学薄膜在线监控技术[D]. 中国科学院上海光学精密机械研究所. 2007. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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