可变径球面曲率测量仪器的研制
文献类型：学位论文
| 作者 | 杨中国 |
| 学位类别 | 硕士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 球面曲率 高精度测量 弓高弦长法 精度分析 光栅传感器 莫尔条纹 |
| 其他题名 | Research on the instrument for measuring spherical curvature with the variable ring |
| 中文摘要 | 高精度球面元件在精密机械和航天工业中的应用越来越广泛，在光学生产的加工制造过程中也大量需要对具有球面形状的透镜的曲率半径进行高精密测量的情况，因此，球面元件曲率半径的精密测量对高质量球面样板，光学系统的质量控制等方面具有重要的意义。目前，球面元件曲率半径的测量仪器正在向着小型化、自动化、模块化、高精度的方向发展。 本文首先对几种球面曲率半径的测量系统进行了深入的理论分析，在分析了各个测量方法优缺点的基础上，选用了“弓高弦长法”的测量原理，并从理论上推导了本文所述系统的可行性，采用光栅传感器、集成电路等新技术成果，将机械、电子技术、计算机技术以及传感器技术有机结合，研制出一种新型的可变径球面曲率测量仪器。具体技术指标为线性位移测量系统（矢高测量）精度要求达到0.1um，相对精度达到0.01%，重复性精度达到0.001%。 文中详细阐述了可变径球面曲率测量仪器的工作原理、系统选型、结构设计，并详细对测量仪器进行了精度分析及精度综合，指出了影响仪器测量精度的重要因素。同时文中还阐述了提高仪器测量精度的方法途径和探讨方案。 |
| 英文摘要 | High-precision spherical components have been widely used in precision machinery and aerospace industry, and spherical curvature is one of determinant to the capability of optical components, and the measure of it is an important matter in the optical component manufacture. So the research of the high precision measurement of spherical curvature has important significance. At present, the measurement instrument of spherical curvature is developing towards miniaturization, automation, modular, and high-precision direction. In this thesis, several kinds of spherical curvature measurement methods are introduced, and the “arch-high and chord-length method” is selected after introduction of the existing methods, and then the novel type of instrument for measuring spherical curvature with the variable ring is developed. In research, the grating sensor, integrated circuits and other new technologies are adopted and integrated. As a result of this, Its specific technical indicator is 0.1um in absolute accuracy, 0.01% in relative accuracy, and 0.001% in repeat accuracy. The novel type of instrument shows that it has the dominating advantages of simple structure, easy manufacturing, convenient operation and high precision. In addition, the working principle of the instrument for measuring spherical curvature is described, and the scheme of structure base on this working principle is designed, and then the accuracy analysis of it is proved in details. Finally, some approaches and exploration projects of improving measurement precision are proposed. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16657]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 杨中国. 可变径球面曲率测量仪器的研制[D]. 中国科学院上海光学精密机械研究所. 2007. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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