大范围激光直写系统的激光扫描研究
文献类型：学位论文
| 作者 | 郝春宁 |
| 学位类别 | 硕士 |
| 答辩日期 | 2012 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 徐文东 |
| 关键词 | 激光直写 振镜扫描 自动聚焦 纳米技术 |
| 其他题名 | Research on Laser Scanning System of the Large-Scale Laser Direct Writing System |
| 中文摘要 | 20世纪80年代发展起来的“纳米科技”引发了科技的深刻变革，给人们的工作和生活带来了翻天覆地的变化。“纳米科技”发展的源动力来自于微纳加工技术的进步。激光直写技术作为一种先进的微纳加工技术，已经获得广泛的应用，并引发了各研究单位对于此项技术研究的热潮。目前，国际上激光直写技术发展较为迅速，与其他技术相结合，在医学、消费电子、汽车电子、微光学、材料学等领域不断开疆拓土，而国内激光直写技术发展相对较晚，工艺水平较国际领先水平有相当的差距。随着国内各相关产业的发展，急需开展对激光直写技术原理、工艺、材料及其应用的研究，提升激光直写技术水平，满足国家相关产业的发展需求。 本论文的目的在于开发一套激光直写光刻系统，提供一种研究平台，为进行大范围、高速度、高精度的激光直写提供支持。 本论文首先介绍了各种微纳加工技术的特点，比较了激光直写技术同其它微纳加工技术的不同和优势，回顾了激光直写技术的国内外研究进展，分析了该技术的演进路线和发展趋势，阐述了本论文的研究目的和内容，然后介绍了系统原理、架构与设计，系统的分析了本系统及其各组成部分设计的原理和思路，最后设计实验验证本系统的实际效果。 本系统采用的主要技术有振镜扫描技术、自动聚焦技术、共聚焦成像技术和微纳拼接技术，本论文简要的分析了各种技术，着重分析了跟激光扫描相关的振镜扫描技术和自动聚焦技术，及其相关的控制系统，其中振镜扫描为激光扫描的主体，自动聚焦技术为保证。 |
| 英文摘要 | The development of "nanotechnology" ，which was originated in 1980s，has triggered profound changes in technology and brought great revolutions in people’s work and life. The sources for the development of "nanotechnology" are advances in nanofabrication technology. Laser direct writing technology as a state of the art nanofabrication technology, has received a wide range of applications, and led to the research units for the research boom of this technology. At present, the international laser direct writing technology development is relatively fast. Combining with other technologies, it is widely practiced in the medicine, consumer electronics, automotive electronics, micro-optics, materials science and etc. While the domestic developments of laser direct writing technology are far behind the international levels. With the development of the domestic industry, there is an urgent need to carry out principles, techniques, materials and applications of laser direct writing to enhance the technical level of the laser direct writing, to meet the needs of national development of relevant industries. The purpose of this paper is to develop a laser direct-write lithography system and to provide a platform for large-scale, high-speed, high-precision laser direct-write support. First, this paper describes the characteristics of a variety of nanofabrication techniques, compares laser direct writing technology with other nanofabrication techniques, reviews the research insights of laser direct-write technology, analysis the technology evolution path and development trends, and introduces the purpose and content of this thesis. And then, the paper introduces the principle, architecture and design of the system and analysis principles and ideas of the design of the system and its various components. Finally, design experiments to verify the practical effect of the system. The system uses galvanometer scanning technology, auto-focus technology, confocal imaging technology and micro-nano-splicing technique. This paper does a brief analysis of concerned techniques and analysis galvanometer scanning technology and auto-focus technology which are essential to laser direct writing system. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16707]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 郝春宁. 大范围激光直写系统的激光扫描研究[D]. 中国科学院上海光学精密机械研究所. 2012. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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