偏振移相菲索干涉测量技术研究
文献类型：学位论文
| 作者 | 朱玲琳 |
| 学位类别 | 硕士 |
| 答辩日期 | 2012 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 曾爱军 |
| 关键词 | 偏振 菲索干涉仪 空间移相 相位延迟量 |
| 其他题名 | Study of polarization phase-shifting Fizeau interferometry |
| 中文摘要 | 光学干涉测量方法具有全场测量、非接触、精度高等特点，在生产和研究中获得了广泛应用。现代干涉测量技术引入了移相技术来辅助提取相位信息，形成了移相干涉测量技术。与传统的光学干涉测量技术相比，移相干涉测量技术采用了数字波面相位检测技术，具有高的面形测量精度，达到波长的百分之一甚至更高，且可以实现自动测量。为了抵抗外界振动的影响，需要将菲索干涉测量光路与空间移相技术相结合形成抗振移相干涉仪。国外已有相关产品问世，但是价格昂贵、结构复杂、操作繁琐，而国内鲜有这方面的研究。面向结构简单、操作方便的抗振移相干涉仪的需求，本论文主要对偏振空间移相菲索干涉测量技术开展研究。本论文的主要研究工作包括： 1. 阐述了干涉测量和移相技术的原理，分析了振动对移相的影响，综述了现有的空间移相干涉测量技术。为了研究基于偏振光技术的空间移相菲索干涉测量技术，详细介绍了其中的偏振光描述方法，给出了光路设计和实验研究中使用的偏振器件及其偏振光干涉原理。 2. 研究了偏振菲索干涉测量技术。介绍了双折射薄膜的原理及其制备结果，提出了两种基于双折射薄膜的偏振菲索干涉测量光路，一种采用线偏振的参考光和测量光，另一种采用圆偏振的参考光和测量光，两种干涉光路都具有结构简单、完全共光路、测量距离远、测量口径大等特点。理论分析了两种干涉测量光路的测量原理，重点阐述了采用圆偏振光进行干涉测量的原因。将两种干涉测量光路与时域移相器相结合，开展了偏振移相菲索干涉测量实验研究，获得了有效的偏振移相干涉图并对其进行了处理，处理结果验证了两种完全共光路偏振菲索干涉测量技术的有效性和采用圆偏振光进行偏振菲索干涉测量的可行性。 3. 研究了偏振空间移相技术。介绍了达曼光栅的原理及其制作结果，研究了一种基于达曼光栅的空间移相器，该移相器可以与采用圆偏振光的偏振菲索干涉光路相结合形成空间移相干涉仪。详细介绍了全反射产生相位延迟的原理，提出了一种基于棱镜全反射的空间移相器，理论分析了该移相器的原理，用光学仿真软件ASAP对它进行了仿真，该移相器具有移相量精确稳定、结构简单紧凑等优点。将两种空间移相器分别引入到偏振菲索干涉测量光路中，开展了空间移相菲索干涉测量的实验研究，获得了空间移相干涉图。实验结果验证了两种空间移相器的可行性。 4. 研究了与快轴方位角无关的相位延迟量测量方法。提出了一种实时测量小相位延迟量的方法，该方法利用二维正交光栅、检偏器阵列分别进行分束和检偏，可以实时求得待测相位延迟量。实验中，利用该方法测得八分之一波片在不同快轴方向上的相位延迟量的测量平均值及其标准差分别为45.1°和0.4°，验证了该方法的有效性。提出了一种实时测量四分之一波片的方法，该方法利用沃拉斯顿棱镜进行分束和检偏，可以实时获得待测四分之一波片的相位延迟量。实验中，利用该方法测得四分之一波片在不同快轴方向上的相位延迟量的测量平均值及其标准差分别为89.5°和0.25°，很好地验证了该方法的有效性。 |
| 英文摘要 | Optical interferometry method has characters of full-field measurement, no contact, and high precision. It is widely used in production and research. Phase-shifting technology is introduced to modern interferometric technique to assist extracting phase information and form phase-shifting interferometry. Compared with traditional optical interferometry, phase-shifting interferometry uses digital wavefront phase detecting technique and has high precision for detecting surface phase, up to one hundredth of wavelength and even higher. It also can realize automatic measurement. In order to resist to the influence of external vibration, it needs to combine Fizeau interferential light path and spatially phase-shifting technology to form anti-vibration phase-shifting interferometer. At abroad, related products have been developed, but they are expensive, structure complex and not easy to operate. At home, research in this field is very few. For demand of simple-structure, convenient-operation and anti-vibration phase-shifting interferometer, polarization spatially phase-shifting Fizeau interferometry is researched in this thesis. The research includes: 1. Principles of interferometry and phase-shifting technology are described. Impact of vibration to phase shift is analyzed. Spatially phase-shifting interferometry is summarized. In order to research spatially phase-shifting Fizeau interferometry based on polarized light technology, detailed description method of polarized light, polarization device that is used in design of light path and experimental study and principle of polarized light interference are all described. 2. Principle and preparation of birefringent thin film are introduced. Based on birefringent thin film polarization, two kinds of polarization Fizeau interferential light path are proposed, one adopts linearly polarized reference beam and test beam and the other adopts circularly polarized reference beam and test beam. The two kinds of light path both have advantages, such as simple structure, complete common path, long measurement distance and large measurement aperture. Their measurement principles are theoretically analyzed. Reason of using circularly polarized light for interferometry is especially explained. Temporal phase shifter is respectively combined with the two kinds of light path and related experimental study is carried out. Effective polarization phase-shifting interferograms are obtained and processed. The usefulness of two kinds of completely common-path polarization Fizeau interferometry and feasibility of adopting circularly polarized light for interferometry are verified by processed results. 3. Principle and preparation of Dammann grating are introduced. A spatial phase shifter based on Dammann grating is researched. It can combine with polarization Fizeau interferential light path adopting circularly polarized light to form spatially phase-shifting interferometer. Detailed principle of total internal reflection producing phase delay is introduced. A spatial phase shifter based on total internal reflection of prism is proposed. Its principle is theoretically analyzed. It is simulated by using optical simulation software ASAP. The phase shifter has advantages of accurate and stable amount of phase shift and compact structure. The two kinds of spatial phase shifter are respectively introduced into polarization Fizeau interferential light path and experimental study of spatially phase-shifting Fizeau interferometry is carried out. The phase-shifting interferograms are obtained and verify the usefulness of the two kinds of spatial phase shifter. 4. A real-time measurement method of small retardation is proposed. It uses two-dimensional orthogonal grating and analyzer array to split and analyze beam, respectively. It can obtain tested retardation in real time. In experiment, the mean and standard deviation of measurement results for retardation of an eighth-wave plate in different directions of fast axis are 45.1°and 0.4°. These results verify the usefulness of this method. A real-time measurement method of quarter-wave plate is proposed. It uses Wollaston prism to split and analyze beam. It can obtain the retardation of tested quarter-wave plate in real time. In experiment, the mean and standard deviation of measurement results for retardation of a quarter-wave plate are 89.5° and 0.25°. These results verify the usefulness of this method. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16714]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 朱玲琳. 偏振移相菲索干涉测量技术研究[D]. 中国科学院上海光学精密机械研究所. 2012. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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