光学加工过程中元件亚表面缺陷的检测与控制
文献类型：学位论文
| 作者 | 肖坤 |
| 学位类别 | 硕士 |
| 答辩日期 | 2012 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 亚表面缺陷 光学加工 检测与控制 全内反射显微镜法 |
| 其他题名 | Detection and control of subsurface damage of optical components during optical fabrication process |
| 中文摘要 | 在高功率激光装置中，激光光学元件的负载能力往往是至关重要的一环，而光学元件表面加工的缺陷则常常会制约着激光负载能力的提升。对光学元件亚表面缺陷开展深入的研究，有利于分析亚表面缺陷产生成因，控制产生亚表面缺陷的光学加工过程，对于提高光学玻璃的激光损伤阈值具有重要的研究价值和学术意义。 在光学加工过程如研磨、抛光等过程中，由于对光学元件的机械物理作用和化学作用，因而在元件表层下方会不可避免地产生一系列微小的裂纹或孔洞，称之为亚表面缺陷。它是造成元件抗激光损伤能力下降的主要原因之一。亚表面缺陷深度的平均值(SSD)与表面粗糙度p-v值(Rz)之间有一个确定的比例系数，该系数与光学加工的环境有关。目前有许多检测亚表面缺陷的方法，主要分为有损检测和无损检测两大类，各自具有不同的应用范围。 为了获得表面粗糙度和亚表面缺陷程度不一样的样品，我们采用了不同的加工手段。在加工的过程中考虑到了酸蚀的作用，利用酸蚀去除材料的抛光层，扩大裂纹，暴露了亚表面缺陷。之后利用三种检测方法对这些样品进行了检测，分析其亚表面缺陷与加工工艺之间的联系。我们使用了共聚焦荧光显微镜观察了样品的亚表面缺陷结构，得到其三维图像，并估计出样品的亚表面缺陷深度值。利用击坑法这种简易的有损检测方法观测了四组样品的亚表面缺陷，发现因加工方式不同，样品产生的亚表面缺陷会有差别。 最后重点介绍了使用全内反射显微镜法观察样品的亚表面缺陷，结果得到亚表面缺陷的程度与表面粗糙度p-v值是保持相对一致的。抛光可以有效减少亚表面缺陷，在抛光过程中加入酸洗能够打开闭合的裂纹，从而更利于后续的加工过程去除前面所产生的亚表面缺陷，从而可以更好地去除样品的亚表面缺陷。观察得出使用全内反射显微镜法比使用暗场法观察到的样品的亚表面缺陷在数量上以及尺寸上都占有优势。并发现在临界角状态下，全内反射显微镜可以观察到最多的缺陷。当入射角增加时，观察到的缺陷的数目减小。最后提出了一种在光学加工过程中有效控制元件亚表面缺陷的方法。 |
| 英文摘要 | In high power laser equipments, the load capacity of laser optical components plays an important role, while the surface damage of optical components often restricts the exaltation of the load capacity of laser optical components. It is of most researching and academic importance to deeply investigate the subsurface damage of optical components, which is propitious to analyze the origin of subsurface damage, control the optical fabrication process which would result in subsurface damage, and increase the laser-induced damage threshold of optical glasses. In the optical fabrication process such as grinding and polishing, some micro cracks would appear inevitably beneath the surface of glass due to the mechanical and chemical effects on the optical glasses, which are called subsurface damages. They are one of the main reasons of the degression of the components'' anti-laser-damage capacity. There is a certain proportion factor between the average value of subsurface damage and the surface roughness p-v value (Rz), which is related to the environment of optical fabrication. At present there are lots of methods to detect the subsurface damage, including destructive ones and non-destructive ones, all of which have different range of application. In order to obtain samples with different degree of surface and subsurface damage, we applied different processing methods. Considering the effect of etching, we used etching method in fabrication process to remove the polished layer of material, expand the scratch, and expose the subsurface damage. Then we used three kinds of method to detect these samples, and analyzed the relation between subsurface damage and fabrication process. We observed the sample using confocal fluorescence microscopy and obtained its 3D image, and then we estimated the depth of subsurface damage of the sample. We detected the samples using ball dimpling method, and we found that subsurface damage varies from each other because of different fabrication process. At last we emphasized the total internal reflection microscopy (TIRM) to detect the subsurface damage, and we found the surface roughness p-v value is corresponding to the subsurface damage. Polishing would reduce the subsurface damage effectively. Adding etching into polishing could open the closed scratch, thus the succeeding process may remove the subsurface damage generated before, so that we can make better components. Through the observation we can get a conclusion that the quantity and size of the subsurface damage of samples are much larger using TIRM instead of dark field method. The total internal reflection microscopy can observe the largest quantity of damages in the critical angle of incidence. The quantity decreases when the angle of incidence increases. In the end we put forward an effective method to control the subsurface damage during optical fabrication. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16727]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 肖坤. 光学加工过程中元件亚表面缺陷的检测与控制[D]. 中国科学院上海光学精密机械研究所. 2012. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。