大数值孔径光刻照明光瞳偏振参数检测技术研究
文献类型：学位论文
| 作者 | 汤飞龙 |
| 学位类别 | 硕士 |
| 答辩日期 | 2013 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 步扬 |
| 关键词 | 光刻 偏振光照明 偏振光检测 照明光瞳 Stokes参量 |
| 其他题名 | Study on polarimetry of illumination pupil for high-NA Lithography |
| 中文摘要 | 光刻机是集成电路制造的核心设备，光刻分辨率决定了集成电路芯片的特征尺寸。通过增大光刻机投影物镜的数值孔径可提高光刻分辨率。对于大数值孔径光刻机，照明光偏振特性对光刻成像质量的影响已无法忽略。精确控制偏振光照明可有效提高光刻成像质量，高精度的照明光瞳偏振参数检测是高精度偏振光照明控制的前提与基础。本文针对照明光瞳偏振参数的高精度和实时检测，围绕基于旋转波片法和同步测量法的偏振检测技术展开研究。研究工作主要包括以下几个方面： 1. 波片相位延迟量误差是影响旋转波片法测量Stokes参量精度的主要因素。通过对旋转波片法测量过程进行理论分析，研究了测量误差与相位延迟量误差之间关系。在此基础上，提出了一种提高Stokes参量测量精度的优化旋转波片法偏振检测技术。该技术通过调整检偏器透光轴方向与待测光束偏振方向成90°或45°后再进行测量，显著减小了 1/4波片相位延迟量误差对Stokes参量测量的影响。实验结果表明，采用所提出的优化旋转波片法使Stokes参量测量误差从传统旋转波片法的3.70%降低至0.74%以内。 2. 通过对波片和检偏器参数进行校准，可有效提高旋转波片法偏振检测装置测量精度。针对现有校准方法操作复杂的不足，提出了一种旋转波片法偏振检测装置器件参数校准技术。该技术以水平线偏振光[1,1,0,0]T 作为标准参考光，分别在检偏器方位角为0°和45°时，对标准参考光各进行一次测量，计算得出器件参数误差，从而实现偏振检测装置器件参数校准。该技术操作简单、可行性强、校准精度高。实验结果表明，通过对偏振检测装置器件参数校准，Stokes 参量测量误差从原来的3.23%降低至0.40%以内。 3. 提出了一种基于波片阵列的实时偏振检测技术。利用消偏振分光棱镜组、波片阵列、检偏器和光电探测器阵列可实现Stokes参量的实时检测，通过优化波片阵列的相位延迟量、快轴角度和检偏器的透光轴角度，可使得Stokes参量测量精度得到进一步提高。 |
| 英文摘要 | Lithography tool is the key equipment for the manufacturing of integrated circuits. The critical dimension of the integrated circuits depends on the lithography tool resolution. Enlargement of the projection lens NA of the lithography tool can improve the resolution. Polarization effect of illumination light seriously influences the imaging quality in high-NA lithography. Polarized illumination must be controlled with high-accuracy for improving the imaging quality. Furthermore high-accuracy polarimetry of the illumination pupil is used in order to control polarization accurately. In this dissertation, focusing on high-accuracy and real-time polarization measurement of the illumination pupil, the polarimetry based on rotating quarter-wave method and simultaneous measurement method is studied. The main work is as follows: i. The measurement accuracy of polarimetry based on rotating quarter-wave method is mainly influenced by retardation error of wave-plate. The principle of Stokes parameter measurement is analyzed theoretically, the relation between the retardation error and the measurement error is discussed. An improved rotating quarter-wave method is proposed for improving the measurement accuracy. In this method, the angle between the axis of polarizer and the polarization direction of the light is adjusted to 90 or 45 degree before measurement. The influence of the retardation error on the measurement accuracy is reduced obviously. Experiment results show that the measurement error of Stokes parameter is reduced by the proposed method from 3.70% to less than 0.74%. ii. The measurement accuracy of polarimeter based on rotating quarter-wave method can be effectively improved by calibrating the wave-plate and analyzer. A new simple calibration method of polarimeter is proposed. In this method, horizontal polarized light [1,1,0,0] T is used as a standard reference input light, and it is measured when the polarizer is fixed on 0 and 45 degree respectively. The parameter errors can be calculated and obtained to calibrate the polarimeter. This method is simple, feasible and with a high accuracy. Experiment results show that the measurement error is reduced by the proposed method from 3.23% to less than 0.40%. iii. A real-time polarimetry based on wave-plate array is proposed. The real-time measurement of Stokes parameter can be obtained by a non-polarizing beamsplitter group, a wave-plate array, an analyzer and a detector array. The measurement accuracy can be further improved by optimizing the retardation and the fast axis angle of wave-plate array, and the angle of analyzer. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16770]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 汤飞龙. 大数值孔径光刻照明光瞳偏振参数检测技术研究[D]. 中国科学院上海光学精密机械研究所. 2013. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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