光学材料及元器件米勒矩阵测量技术研究
文献类型：学位论文
| 作者 | 曹绍谦 |
| 学位类别 | 硕士 |
| 答辩日期 | 2013 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 步扬 |
| 关键词 | 测量 偏振 米勒矩阵 单光弹调制器 条件数 误差方程 全光场 |
| 其他题名 | Research on Measurement Techniques for Mueller Matrix of Optical Materials and Components |
| 中文摘要 | 极大规模集成电路制造、医疗诊断、军事探测、航空航天、环境探测、地质勘探、光通信等领域广泛地应用光学偏振特性实现高精度的成像与检测。米勒矩阵是描述光学材料及元器件偏振特性的有效且普遍方式。米勒矩阵通常无法通过理论推导得到，只能通过实验检测获得。现有米勒矩阵测量技术需要在测量过程中旋转1/4波片、光弹调制器及检偏器等多种器件，测量误差大，且存在对目标介质偏振信息检测不完全等缺陷。针对上述不足，为实现单光束、全光场米勒矩阵的高精度、快速测量，本文主要研究了几种改进的米勒矩阵测量技术。论文主要内容包括： 1. 提出基于单光弹调制器的米勒矩阵测量技术，研究米勒矩阵测量优化算法及系统参数两步校准法。首先通过两步校准法对系统参数进行校准测量，然后利用校准后的系统参数与优化算法计算得到待测样品的米勒矩阵。实验结果表明，同快轴方位角为0°的1/4波片标准米勒矩阵相比，待测1/4波片米勒矩阵各元素最大相对误差的直接测量值和间接测量值分别为1.97%和0.83%，均小于最大相对误差的模拟仿真值2.11%。通过提高旋转台的读数精度和使用更小相位延迟量标称偏差的1/4波片，可以进一步减小米勒矩阵各元素测量的最大相对误差。 2. 提出基于单光弹调制器的米勒矩阵测量误差方程，给出了相对误差分析方法，并结合矩阵条件数得到了降低米勒矩阵各元素最大相对误差的两组1/4波片方位角优化组合。实验结果表明，该两组优化组合，测量得到的待测1/4波片米勒矩阵各元素最大相对误差的直接测量值和间接测量值分别只有0.39%、1.06%和0.12%、0.20%。相比传统1/4波片方位角优化组合{-90°,-45°,30°,60°}，米勒矩阵测量精度分别提高了80.20%、46.19%和85.54%、75.90%。 3. 提出一种全光场米勒矩阵测量技术，给出全光场米勒矩阵测量装置及原理，并对部分常用光学元器件全光场米勒矩阵二维分布进行了模拟仿真。该测量装置共光轴、结构稳定、无需机械转动、空间分辨率高且测量速度较快，同时能够提取待测样品全光场的米勒矩阵二维分布。 |
| 英文摘要 | To achieve high-precision imaging and detection, optical polarization is widely applied to manufacturing of ultra-large scale integrated circuits, medical diagnosis, military detection, aerospace, environment detection, geological exploration, optical communications, and so on. Mueller matrix is an effective representation to describe polarization characteristics of optical materials and components. Mueller matrix usually cannot be obtained by theoretical derivation, but it can be abtained by experimental test. Present measurement techniques for Mueller matrix have serious rotation errors in the process of measurements, and they can’t obtain the complete polarization information of the measured target. Several kinds of measurement techniques for Mueller matrix are studied to realize the rapid and high-precision measurements. The following contents are covered: i. A measurement technique for Mueller matrix based on a single photo-elastic modulator is proposed to compensate for errors of the current measurement methods. An optimization algorithm and a system parameter two-step calibration procedure are also presented. System parameters are calibrated firstly by the two-step calibration procedure. Then, the Mueller matrix of the measured sample is obtained with the optimization algorithm. Compared to the standard Mueller matrix of a quarter-wave plate whose fast axis angle is set at 0°, the experimental results show that the maximum relative errors of each element of the Mueller matrix of the measured quarter-wave plate are 1.97% and 0.83% with direct and indirect measurement method respectively. Both errors are less than 2.11%, which is the simulation value of the maximum relative error. Using the quarter-wave plate with smaller retardation tolerance or improving the precision of the rotation stage can both diminish the maximum relative error of each element of the Mueller matrix. ii. An error equation and a relative error analysis method of the measurement technique for the Mueller matrix based on a single photo-elastic modulator are proposed. Considering the relative error and the condition number, two optimum angle sets for the quarter-wave plate are obtained, which diminish the maximum relative error of each element of the Mueller matrix. The experimental results show that the direct and indirect measurement values of the maximum relative errors of each element of the Mueller matrix of the measured quarter-wave plate are 0.39%, 1.06% and 0.12%, 0.20% respectively by using the two optimum angle sets above. Compared to the traditional optimum angle sets {-90°,-45°,30°,60°} for the quarter-wave plate, the measurement accuracy of the Mueller matrix increases by 80.20%, 46.19% and 85.54%, 75.90% respectively. iii. A scene measurement technique for the Mueller matrix is proposed. The 2D distributions of the Mueller matrix of some optical components are also simulated. The measurement device is a common optical axis structure with good stability, and no mechanical rotation is needed. The 2D distribution of the Mueller matrix of the measured sample can be extracted with high spatial resolution and high measurement speed. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16771]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 曹绍谦. 光学材料及元器件米勒矩阵测量技术研究[D]. 中国科学院上海光学精密机械研究所. 2013. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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