飞秒激光在三维光流功能器件制备上的应用研究
文献类型：学位论文
| 作者 | 林迪 |
| 学位类别 | 硕士 |
| 答辩日期 | 2013 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 程亚 |
| 关键词 | 飞秒激光 微加工 熔石英玻璃 微混合器 光流体 |
| 其他题名 | Application of Femtosecond Laser in Fabrication of 3D Optofluidic Devices |
| 中文摘要 | 设备集成化、微型化的研究一直是科学研究的一个重点。芯片实验室（Lab-on-a-chip）或称微全分析系统（Micro Total Analysis System）将具备各种功能的微型器件集成在一个芯片上，完成完整的检测过程，具有用样少、速度快、效率高、灵敏度高等一系列优点。传统微流控芯片通常基于软刻蚀技术制备，可以完成二维的精细加工，所制备的微芯片大都是平面的，难以加工集成度更高、具备更多功能的三维器件。飞秒激光微加工技术由于可以实现对透明材料进行高精度三维加工而备受关注。基于飞秒激光微加工技术制造的各种高性能微流控器件、光流控器件、微光学器件在化学、生物学、光学、环境科学等领域得到广泛应用。其中，由于石英玻璃本身具备优良的光学性能、化学稳定性、生物兼容性，基于石英玻璃的飞秒激光微加工已成为该领域内的一个研究热点。 本文重点研究了飞秒激光微加工技术在新型光流功能器件制备上的应用： 1、在熔石英基片上成功制备了三维SHM（Staggered Herringbone Mixer）。与和它具备相同底面结构的二维SHM相比，三维SHM的混合效率大大提升，两种液体有效混合所需的混合长度减少了将近一半。 2、将高性能微透镜与光波导相结合，在熔石英玻璃基片上成功制得了具备完整激发光耦合光路与信号光耦合光路的集成探测器。由于使用了高性能微透镜，与仅有波导的情况相比，探测器的灵敏度大大提高。另外，由于使用波导作为输入端与输出端，因此该探测器具备与光纤功能设备高效耦合的能力。 |
| 英文摘要 | Miniaturization and integration of devices have always been a key in scientific research. Lab-on-a-chip, also known as micro total analysis system, aims at the integration of different functional micro devices, in order to complete the whole analysis procedure in one chip. It has a series advantages, such as minimized dosage of sample, fast detection process, high efficiency, and high sensitivity. Traditional micro-fluidic devices are generally based on soft lithography, which is capable of two-dimensional fabrication of planar devices with high fineness. However, it is very hard for this technology to fabricate highly integrated three dimensional devices with various functions. Femtosecond laser micro machining attracts much attention for its capability of high precision micromachining in transparent materials. Various kinds of high performance micro fluidic, optofluidic, and photonic devices fabricated by femtosecond laser micromachining have found their applications in realms of chemistry, biology, optics, and environmental science. Fused silica has become a research hotspot within the realm of femtosecond laser micromachining, because of its excellent optical properties, chemical stability, and biological compatibility. This dissertation focuses on the application of fabrication of new optofluidic devices using femtosecond laser micromachining. The new devices are described as follows. We successfully fabricated a three dimensional staggered herringbone mixer on the fused silica substrate. The mixing efficiency has been considerably improved compared to its two dimensional counterpart. In the experiment, the mixing length is reduced nearly a half. In addition, a integrated detector, including a full incident and collecting couple light path, is made by combining micro-lens and optical waveguide on a fused silica substrate. Because high performance micro-lens is used in the detector, the detection sensitivity is significantly improved compared with the only-waveguide detector. Furthermore, the waveguide gives the detector the ability to perfectly compact with fiber based devices. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16799]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 林迪. 飞秒激光在三维光流功能器件制备上的应用研究[D]. 中国科学院上海光学精密机械研究所. 2013. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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