大口径光学元件的透射率和反射率的精密检测
文献类型：学位论文
| 作者 | 张春香 |
| 学位类别 | 硕士 |
| 答辩日期 | 2011 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱宝强 |
| 关键词 | 锁相放大 光电探测器 系统重复性 相关检测 |
| 其他题名 | Accurate Detection for Transmittance and Reflectance of Large-aperture Optics |
| 中文摘要 | 在高能激光装置中，镀膜光学元件膜层的透过率和反射率及其均匀性，作为大口径光学元件镀膜的重要技术指标，直接影响到高通量的激光光束的质量及取样精度。膜层透/反射率的精密检测技术是研制高均匀性薄膜的重要基础，进而用来控制光束质量。而传统的分光光度计膜层检测技术在检测精度与大口径空间分布测量方面还不能满足需求。本论文对此进行了系统研究，设计了透/反射率及均匀性测量系统，针对单点重复精度，进行验证性实验分析，提高了样机的稳定性，并对系统精确度进行校准，完成扫描定位部分演示实验。对样机开发做了详细的验证分析，为此类仪器设计、选型和工程应用提供分析依据。 |
| 英文摘要 | In the high-power laser configure, the transmittance and reflectance and uniformity of film layers of optical components, which are critical technical specifications of deposition uniformity for large-aperture optics, affect the beam quality and sampling accuracy directly for high throughput laser beam. Nevertheless, the detection technique for film layer by use of the traditional spectrophotometer is below the special requirement as respect to the detection accuracy and spatial distribution measurement for large-apertures. As regards to this point, systematic research has been done in this article, measurement system for transmittance and reflectance and uniformity is designed thoroughly, verification experiment is conducted aimed at the repeatability for single point. Calibration for measurement accuracy is also conducted, as well as most parts of the demonstration experiment about single point scanning and position. Detailed analysis is finished for prototype development, and concrete parameter selections are provided to the instrument design, device selection and engineering application. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16810]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 张春香. 大口径光学元件的透射率和反射率的精密检测[D]. 中国科学院上海光学精密机械研究所. 2011. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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