可用于光刻自动聚焦的高灵敏度流量计式位移检测系统
文献类型：学位论文
| 作者 | 刘涛 |
| 学位类别 | 硕士 |
| 答辩日期 | 2014 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 徐文东 |
| 关键词 | 测量 激光光刻 自动聚焦 喷嘴挡板 |
| 其他题名 | High Sensitivity Pneumatic Micro-distance Measurement System for Lithography Autofocus |
| 中文摘要 | 为解决传统光学检测方法存在的对已刻（干刻）区域无法检测、潜在曝光可能性、系统光路复杂以及灵敏度较低等缺点，提出了一种可用于激光直写光刻自动聚焦的高灵敏度流量计式位移检测系统。详细介绍了系统的原理、系统设计、实验方法以及误差分析等。根据流量传感器检测得到的气流变化，可以判断光刻系统中聚焦系统是否离焦以及离焦量的大小。再将此气流变化量转化为电压值反馈至PZT执行机构，通过执行机构实现自动聚焦。由于喷嘴挡板系统可以建立喷嘴挡板间距与喷嘴内部压力的关系，而流量敏感度要高于压力敏感度，故采用了热线探针来检测系统流量变化。本论文包含如下四部分： 第一章介绍了激光光刻在实际生活中的广泛应用以及影响激光光刻的最主要因素——对于激光焦点的控制技术；对国内外研究过的自动聚焦技术进行简要介绍，并进行综合比较分析各自的优缺点。 第二章详细介绍了可用于光刻自动聚焦的高灵敏度流量计式位移检测系统的设计过程，其中包括对系统需求的分析确定，研究设计系统的气体源、机械系统以及信号采集与处理系统，选择合适的实验器材、工作条件以及进行电路设计等。 第三章重点介绍了系统的两项关键技术，一是气路设计技术；而是电路设计技术。 第四章对样机的技术指标进行了验证，其中分别对测量精度、系统响应频率以及系统长时间稳定性进行了实验验证。实验结果表明该流量计式位移检测系统能够准确检测系统离焦量，系统测量精度可达100nm，频率响应可达20Hz，量程可达20μm。而且在一定范围内喷嘴挡板间距与空气流量变化具有非常好的线性关系，满足系统设计要求。 |
| 英文摘要 | In order to overcome the shortcoming of the conventional optical focusing method, such as unable to detect on the patterned area, photoetching material’s potential exposure, complicated laser path and low sensitivity, method of using high sensitivity pneumatic micro-distance measurement system for lithography autofocus is investigated. The principle, design, method and error analysis are introduced. The pneumatic micro-distance sensor can detect the varity of air flow to determine the defocusing amount. Transfer the varity of air flow into voltage for piezoelectric translator, and the piezoelectric ceramics will be drived to move to the focus range. Because the air pressure in nozzle flapper is releated with detection distance, and the air flow is more sensitive than pressure. So hotwire probe is used to detect the varity of air flow. This paper consist of four chapters: In chapter 1, the extensive use in our daily life of laser lithography and the main factor which is autofocus that can directly affect the quality of laser lithography are introduced. And then, the all kinds of autofocus system and their merits and drawbacks are introduced thoroughly. In chapter 2, the high sensitivity pneumatic micro-distance measurement system for lithography autofocus is introduced thoroughly. The prototype is developed in detail with analysis of system requirements, gas source, mechanical system and signal acquisition and processing system. The selection of experimental equipment, working condition and the circuit design are described. In chapter 3, two key technologies are introduced: gas circuit design; circuit design. In chapter 4, the performance of the prototype of high sensitivity pneumatic micro-distance measurement system for lithography autofocus is verified in experiment. The prototype can detect the focusing displacement accurately. The result shows that the accuracy of the measurement system can reach 100nm, frequency response can come to 20Hz, the measuring range can be 20μm. Within a certain range the detection distance has quite good linear relation with the varity of air flow. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16848]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 刘涛. 可用于光刻自动聚焦的高灵敏度流量计式位移检测系统[D]. 中国科学院上海光学精密机械研究所. 2014. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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