偏振横向剪切干涉技术研究
文献类型：学位论文
| 作者 | 刘蕾 |
| 学位类别 | 硕士 |
| 答辩日期 | 2014 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 曾爱军 |
| 关键词 | 剪切干涉 偏振 移相 双折射 |
| 其他题名 | Study of polarization lateral shearing interferometry |
| 中文摘要 | 光学测量技术因其测量精度高、灵敏度高、非接触性测量等特性，已经广泛应用于光学加工检测、精密机械加工和激光技术研究中。泰曼－格林干涉仪、菲索干涉仪等都需要一个或几个高精度的标准镜面来产生和传递标准波面。剪切干涉仪将被测波面与其被剪切复制的波面进行干涉，它不需要标准参考面且结构简单、紧凑，且不易受环境影响。在剪切干涉仪中，引入移相技术可以提高其测量精度，并实现波面的自动测量。偏振移相技术利用偏振器件将剪切光束进行相位调制，具有原理简单，移相量易于控制等特点，更为重要的是偏振移相技术可以进行空间移相，进而实现波面的动态测量。因此，研究满足空间移相要求的偏振剪切干涉技术具有重要的理论价值与应用前景。本文主要对偏振横向剪切干涉技术展开研究，主要研究工作包括： 1.研究了基于单偏振分光平板的横向剪切干涉技术。分析了基于偏振分光平板的分光原理，利用ASAP仿真软件对该横向剪切干涉光路进行了理论推导以及仿真分析，实验验证了该横向剪切干涉技术的有效性。 2.研究了基于双偏振分光平板的横向剪切干涉技术。利用双偏振分光平板一组正交的反射面，实现了剪切复制的两光束等光程干涉。详细分析了双偏振分光平板实现等光程干涉的原理，并对该横向剪切干涉光路进行了仿真分析和实验研究，验证了该横向剪切干涉技术的有效性。 3.研究了基于双折射晶体平板的横向剪切干涉技术。分析了双折射晶体平板绕主平面和绕光轴旋转的两种分光情况，推导了它们的剪切量及光程差随入射角变化的情况。利用反射镜使剪切复制的光束二次通过四分之一波片和双折射晶体平板，实现等光程干涉。通过改变入射角可以实现剪切量的连续可调，适合不同口径不同波高的小光束波面的测量。分别对该测量光路进行了仿真分析和实验研究，验证了该二维横向剪切干涉技术的有效性。 4. 研究了移相偏振分光平板剪切干涉技术。将四分之一波片、可旋转偏振片组成的偏振移相器与偏振分光平板相结合，实现了移相横向剪切干涉测量。进行了该移相横向剪切干涉光路的仿真分析，开展了相应的实验研究，验证了该偏振横向剪切干涉技术与偏振移相技术相结合的可行性。 5. 研究了移相双折射晶体平板剪切干涉技术。利用双折射晶体平板分光的剪切量及光程差的曲线特点，提出了旋转双折射晶体平板实现移相横向剪切干涉方法。理论分析了该测量技术的移相原理，采用四步移相法计算了旋转双折射晶体实现等步长移相的角度。对该测量光路进行了仿真分析和实验研究，通过等步长转动双折射晶体平板得到一系列等步长移相的横向剪切干涉图。验证了该移相横向剪切干涉技术的可行性。 |
| 英文摘要 | Optical measuring technique has characters of high precision, high sensitivity and no contact. It is widely used in optical manufacture and testing， precision machining and research. Most interferometers require one or more standard planes of high precision to produce and transfer wavefront, such as Twyman-Green interferometer and Fizeau interferometer. In shearing interferometer, an original wavefront and a copy one interfere. It needs no standard reference plane with a simple, compact and stable structure. Phase shifting technology is introduced to interferometer to improve precision and realize automatic measurement. Polarization phase shifter introduces phase modulation between the two interference beams to realize different phase shifting. It is simple and the phase shifting is easy to control. In most of the existing spatially phase shifting technology, polarization interference is required. Thus there are great theoretical and practical values for the research of polarization interferometry. In this paper, the main research work is focused on the following issues: 1. Lateral shearing interferometry based on single polarization beam splitter plate is researched. Principle of polarization beam splitter plate is described. The lateral shearing interferometry is simulated using ASAP software. Interferogram is obtained by experimental study. The usefulness of the interferometer is verified. 2. Lateral shearing interferometry based on double polarization beam splitter plates is researched. Equal optical path difference interference is realized by the design of the relative position of the double polarization beam splitter plates. Principle of the lateral shearing interferometry is described. The validity of the interferometer is verified both by simulation and experiment. 3. Lateral shearing interferometry based on thick birefringent plate is researched. The shearing amount change and the optical path difference change with incident angle are theoretically analyzed when the thick birefringent plate is rotated from the mutually perpendicular directions. Equal optical path difference interference is realized by a mirror and a quarter waveplate. Adjustable shearing amount can be obtained by rotating the thick birefringent plate. A series interferograms of different shearing amount are obtained by simulation and experiment respectively. The validity of the two dimensional interferometer is verified. 4. Polarization phase shifting lateral shearing interferometer based on polarization beam splitter plate is researched. The polarization phase shifter is consist of a quarter waveplate and a rotatable polarizer. Principle of the interferometer is described. A series phase shifting interferograms are obtained by simulation and experiment respectively. The validity of connection of the polarization lateral shearing interferometer and phase shifting technology is verified. 5. Polarization phase shifting lateral shearing interferometer based on thick birefringent plate is researched. With the characters of the shearing amount and the optical path difference change with incident angle, phase shifting can be obtained by rotating the thick birefringent plate. Principle of the phase shifting technology is described. Rotation angle of equal step phase shifting is calculated by four step phase shifting method. A series phase shifting interferograms are obtained by simulation and experiment respectively. The validity of the polarization phase shifting lateral shearing interferometer is verified. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16856]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 刘蕾. 偏振横向剪切干涉技术研究[D]. 中国科学院上海光学精密机械研究所. 2014. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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