基于旋转达曼光栅的多路并行激光直写系统
文献类型：学位论文
| 作者 | 黄巍 |
| 学位类别 | 硕士 |
| 答辩日期 | 2014 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 周常河 |
| 关键词 | 旋转 达曼光栅 激光直写 |
| 其他题名 | Parallel laser direct-writing system with rotary Dammann grating |
| 中文摘要 | 随着微纳加工技术和半导体微电子技术的发展，微光学元件也得到了广泛的关注和应用。光栅作为微光学领域的关键部件，更是得到了研究人员的青睐，也被广泛应用于天文探测、军事、工业制造和科学研究之中，特别是大尺寸和高密度的光栅，在各个领域都有很大的需求。国外在光栅制作工艺上处于领先地位，相对而言，国内的制作工艺还有很大的发展空间。目前来说，在众多光栅制造技术中，并行激光直写技术以其相对较低的技术成本、很高的生产效率和产品质量脱颖而出，因此，研究出新一代的激光直写设备、进一步改进光栅的制造工艺意义重大。 本文主要介绍了基于旋转达曼光栅的并行激光直写平台，在开发平台的过程中，我们还设计并制造了低发散度的达曼光栅用于进一步的科研以及改进系统。开发出一个具有高效率和灵活性的激光直写系统，并且刻写出多种衍射光学元件，是本论文的意义所在。 本论文首先简要介绍了光栅制作技术的发展历史，分别对刻划光栅、全息光栅、电子束直写光栅、激光直写光栅等方法做了一定的分析，明确了激光直写技术的优势和不足，以明确开发系统的主要方向。然后对激光直接系统的发展历史做了一定的介绍，对国内外的激光直写方案都进行了分析，为自行开发激光直写系统做一定的参考。然后对达曼光栅做了一定的介绍，作为该系统的核心功能元件，详细了解它的特性意义重大。 做完相关的背景调研之后，我们根据自己课题组的实际需求，开发出了基于旋转达曼光栅的激光直写系统。该激光直写系统是面向高精度、大尺寸的光栅所开发的。开发系统的难点集中于减小系统误差和自聚焦系统。自聚焦系统我们选择了相应速度很快的压电陶瓷，我们利用了象散法的原理，通过四象限探测器来实现了实时快速自动聚焦。 之后我们主要介绍了平台的机械设计。我们采用了主动隔振平台来减小环境振动的误差，通过紧凑型系统设计减小了安装过程中的机械安装误差，同时，我们还采用了气浮平台和压电陶瓷技术来保证刻写平台的定位精确。这章我们主要介绍了两种机械设计的方案，分别从设计初衷、设计指标、实施难度和可能产生的误差进行了详细地分析。 我们提出了利用旋转一维达曼光栅刻写变间距光栅、准啁啾光栅的方案，以及旋转二维达曼光栅大大增加系统的刻写速度的方案，从而使得旋转达曼光栅这个方法具有很好的实际意义。在本论文中我们还列出了用该系统刻写出来的多种衍射光栅，实验结果表明该系统的功能达到了预期。由于航空航天科技的需要，同时为了改进自己的系统，我们自主设计并制造了低发散度的达曼光栅。由于空间激光中的光程较长，而传感器的面积有限，低发散度的达曼光栅能够在空间激光分束上起到重要的作用，也简化了空间激光的光路。我们首先利用周常河老师改进的优化算法，计算出了达曼光栅的归一化相位转折点，然后根据波长和发散角等具体参数计算出了符合要求的达曼光栅的实际周期和刻蚀深度，最后我们利用激光直写系统成功刻写出了符合要求的低发散度的达曼光栅。 |
| 英文摘要 | Nowadays, the rapid development of the micro-nano machining and semi-conductor lead to the wide application and attention of the micro-optics. As the key component in the field, grating has attracted much attention from researchers due to its wide applications; such as astronomical detection, military application, industrial and scientific research, especially the large area and high-density one. The fabrication process of the grating has ranked the advanced level in many foreign countries, on the contrary, the domestic one need more development space. Currently, among the various fabricating technology, the parallel laser direct-writing system stands out because of its low costs, high efficiency and good quality, therefore, it is significant to develop a better laser direct-writing system to improve the fabrication of the grating. This paper mainly describes the parallel laser direct-writing system with rotary Dammann grating. During the process on developing the system, we fabricated a low divergent Dammann grating to the further research. The meaning of this paper lies in: developing a laser direct-writing system with high efficiency and flexibility to fabricate various diffractive optical elements. This paper briefly introduces the history of the grating fabrication. Then we analyze the ruled grating, the holographic grating, the electron beam direct-writing technique, in order to clear the development of the laser direct-writing system. Then we introduce the history of the laser direct-writing system at home and abroad to make some reference to our own direct-writing system. We do some introduction on Dammann grating, which is the key component of our system. After some relevant background research, we developed a prallel laser direct-writing system with rotary Dammann grating to meet our requirement. The difficulty is to reduce the system error and develop an auto-focus system. At the same time, we use the flotation platform and PZT to ensure the precision. Besides, we design the auto-focus system based on the astigmatism method. We mainly introduce the mechanical design of this system. We use an active vibration to reduce the environmental vibration, and then we improve the mechanical design of the system. In this chapter we introduce two mechanical design solutions. We concentrate on the index of the system, the difficulties of the system, and the latent error of the system. We propose a method to fabricate VLS and chirp grating by rotating one-dimensional Dammann grating. What’s more, we can greatly increase the speed of the fabrication of the grating by rotating two-dimensional Dammann grating. In this paper, we also present some gratings with different period to show our laser direct-writing system meets our expectation. In order to improve our system and meet the need of the aerospace science, we fabricated the low divergent Dammann grating. Because of the long distance of light path and the limited small-angle area of the sensor, it is significant to have a research on low divergent Dammann gratings. According to the Optimization Algorithms reported by Professor Zhou, we calculate the position of the transition point. And then we calculate the etching depth and the period of the Dammann grating according to the divergent angle and the wavelength. At last we fabricated the low divergent Dammann grating successfully. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16872]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 黄巍. 基于旋转达曼光栅的多路并行激光直写系统[D]. 中国科学院上海光学精密机械研究所. 2014. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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