利用集成微加热器实现芯片上高Q值微腔的共振波长调谐
文献类型：学位论文
| 作者 | 唐家雷 |
| 学位类别 | 硕士 |
| 答辩日期 | 2015 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 程亚 |
| 关键词 | 回音壁模式 光学微腔 飞秒激光 微纳加工 透明介质 |
| 其他题名 | On-chip tuning of the resonant wavelength in a high-Q microresonator integrated with a microheater |
| 中文摘要 | 回音壁模式光学微腔通过介质的全内反射将光限制在极小模式体积内从而在低阈值微激光器、非线性光学、无标记单分子生物传感、腔电动力学以及光机械等应用中发挥着重要的价值。在众多微腔的应用中，对回音壁模式共振波长的精细调谐尤为重要。腔模的调谐一方面可以通过电光、热光效应调节介质的折射率从而改变腔内光子的传输路径来实现；另一方面，回音壁模式对于微谐振腔的几何尺寸非常敏感，可以利用机械压缩或拉伸的办法实现对微腔共振模式的调谐。然而，上述调谐手段通常都需要用到较为繁琐的实验设备，为了实现微腔应用上的便携化以及腔模调谐的简便化，将微腔与电光或热光调谐元件单步集成到同一功能芯片上对目前来说很有必要。 最近，飞秒激光直写技术在多种三维微结构的制造领域中（如光学波导、微流体、微机械、微电极等）已经成为了一种强有力的技术手段。将飞秒激光紧聚焦到玻璃或晶体材料内部后，在多光子吸收的影响下材料内部会受到空间选择性的修饰。因此，这可为同一芯片上多种光功能的集成提供了一个理想的解决办法。具体来说，利用飞秒激光直写技术在玻璃材料以及钕玻璃上成功制备出三维高品质（>106）回音壁模式光学微腔。同时，基于将飞秒激光直写技术可以在玻璃或晶体等透明材料材料表面或内部实现选择性的金属化从而构成微电极或微加热器。然而到目前为止，还没有系统的将这两种技术手段应用到同一功能芯片上。本论文将详细阐述如何利用飞秒激光微纳加工技术制作可调谐的集成微腔芯片，具体内容包括： 1.利用飞秒激光辅助的无电化学镀技术在石英玻璃上实现选择性的金属化。设计玻璃表面的金属化图案使嵌在玻璃上表面的金属丝构成为一个微加热器。微加热器的加热区域约为200×200 μm2，电阻为9.6 ?，相应的电阻率为4.8×10-8 ??m。 2.在含有微加热器的玻璃芯片上利用水辅助的飞秒激光烧蚀技术制备高品质光学微盘腔。微盘腔经过二氧化碳激光回流后所得的微芯环腔直径约80 μm，利用光纤锥与微腔之间的倏逝波耦合技术测得微腔的自由光谱范围约为6 nm，品质因子为1.2 × 106。 3.利用集成芯片上的微加热器实现微腔中心共振波长的调谐。实验结果表明，微腔中心共振波长的漂移与微加热两端所加电压的平方成线性关系，微加热器的调谐速率为1.8 GHz/V2。另外，由于微加热器的加热区域只有200 μm ? 200 μm且距离微腔只有200 μm，集成芯片的响应时间小于10 s，远远低于传统的外部电加热器。 |
| 英文摘要 | Owing to their excellent capability to efficiently confine light in the periphery via total internal reflection, whispering-gallery-mode (WGM) optical microresonators have been playing increasingly important roles in applications such as microlasers, nonlinear optics, chemical and biological sensing, cavity quantum electrodynamics (c-QED), and so on. In most of these applications, precise control of the resonant wavelength of WGM is highly desirable. The wavelength-tuning of WGM has been demonstrated by tactfully tuning the refractive index of the microresonator, which leads to a change in the optical path for the light travelling in the microresonator. Tuning of the refractive index is readily achievable by use of thermal-optical or electro-optical effects. In addition, the WGMs are also sensitive to the geometric shape of microresonator, enabling tuning of the resonant wavelength by slight distortion of the shape of the microresonator using mechanical stretching or squeezing. However, these methods usually need bulk experimental apparatus. To facilitate miniaturization and ease of operation, there is a pressing need for development of a monolithic approach by which the thermal or electric function can be integrated into the microresonator chip. Recently, femtosecond laser direct writing has been proved to be a powerful approach for fabricating various types of three-dimensional (3D) micro-structures such as optical waveguides, microfluidics, micromechanics, microelectrodes, etc. By tightly focusing a femtosecond laser beam in dielectric materials such as glass and crystals, the interior of the material can be modified in a space-selective manner through multiphoton absorption. This technique therefore provides an ideal solution for integrating multifunctional microcomponents in a single chip. Specifically, 3D WGM microresonators of Q-factors on the order of 106 have been fabricated in both fused silica and Nd:glass using femtosecond laser direct writing. Meanwhile, selective metallization has also been achieved in transparent substrates such as glass and crystal based on femtosecond laser direct writing, which has enabled fabrication of microelectrodes and on-chip microheaters. Nevertheless, these techniques have not been synergistically employed for achieving on-chip tuning of the resonant wavelength of a microresonator. Here, we demonstrate fabrication of a microresonator integrated with a microheater on a single chip, which is described in details as follows: 1.Spatial-selectively metallization on the surface of glass has been achieved by electroless copper plating assisted by femtosecond laser micromaching. A microheater is formed after carefully designing the pattern of the copper line. The heater has a resistance of 9.6 ? and the resistivity of the copper plating wire is measured to be ~4.8 × 10?8 Ω ?m. 2.Formation of a microdisk by water assisted femtosecond laser direct ablation with a microheater on the same chip. After irradiated with CO2 laser, microtoriod resonator is formed with a diameter of 80 μm. With the help of fiber taper coupling method, the Q factor of the microresonator is measured to be 1.2 × 106 and the free spectral range (FSR) is about 6.0 nm. 3.On-chip tuning of resonant wavelength in the microresonator can be achieved by varying the electric voltage applied on the microheater. The result shows that the drifting of the resonant wavelength is linearly dependent on the V2 of the microheater and the tuning rate is 1.8 GHz/V2. Since the microheater, whose footprint size is 200 μm ? 400 μm, is located only 200 μm away from the microresonator, the response time of the device is less than 10 seconds which is significantly shorter than the time required for reaching a thermal equilibrium on conventional electric heaters. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16913]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 唐家雷. 利用集成微加热器实现芯片上高Q值微腔的共振波长调谐[D]. 中国科学院上海光学精密机械研究所. 2015. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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