基于液晶波片的相位延迟量和快轴方位角测量技术研究
文献类型：学位论文
| 作者 | 顾帅妍 |
| 学位类别 | 硕士 |
| 答辩日期 | 2016 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 曽爱军 |
| 关键词 | 偏振 液晶波片 相位延迟量 快轴方位角 校准 |
| 其他题名 | Research on Measurement of Retardation and Fast Axis Azimuth Based on Liquid Crystal Waveplate |
| 中文摘要 | 偏振光学系统在浸没光学光刻、激光微纳加工、偏振成像探测等领域的应用日益广泛，它对偏振元器件的加工、装调要求也日渐提高，偏振元器件的相位延迟量和快轴方位角的快速、精确、实时测量显得尤为重要。现有测量方法存在机械转动频繁、相位调制复杂、光栅分束精度低等缺点，本文围绕相位延迟量和快轴方位角的测量展开研究，以实现偏振器件参数的快速、精确测量，主要包括以下方面。 1.概述了偏振光的产生、描述方法，分析了现有的偏振元器件测量技术。阐述了液晶波片的工作原理，分析了液晶波片的时间响应特性和相位延迟特性。 2.研究了一种基于单液晶波片的相位延迟量和快轴方位角测量方法。该方法利用液晶波片的相位延迟量可变特点，实现了波片相位延迟量和快轴方位角的同时测量，具有简单的结构。 3.研究了一种基于多液晶波片的相位延迟量和快轴方位角测量方法，设计并构建了对应的测量装置。测量装置由激光器模块、液晶调制模块、检偏器、光电探测模块构成，将可在多波长条件下实现偏振器件相位延迟量和快轴方位角的快速、精确测量。 4.提出了一种相位延迟量和快轴方位角测量仪器的校准方法。该方法通过反演测量传递矩阵来实现校准，实验验证了该方法的有效性。 |
| 英文摘要 | With the commonly application of polarization system in immersion photolithography, laser micro/nanofabrication, polarization imaging detection and other fields, the requirements for its fabrication and adjustment need to be improved gradually. So it is important to measure retardation and fast axis azimuth of polarization components fast, accurately, and in-situ. But the current methods have several drawbacks, such as frequent mechanical rotation, complicated phase modulation, low precision of grating splitting etc. So we do research on measurement of retardation and fast axial azimuth, it mainly includes the following aspects. 1.The generation of polarized light and its description method are introduced. The available methods of measureing the retardation are analyzed. The working principle of liquid crystal waveplate is narrated. The time response and retardation characteristics of the liquid crystal waveplates are analyzed. 2.Method to measure retardation and fast axial azimuth based on one liquid crystal waveplate is researched. This method realizes the in-situ measurement of retardation and fast axial azimuth with the retardation of liquid crystal waveplate controlled by applied voltages. 3.Method to measure retardation and fast axial azimuth based on multiple liquid crystal waveplates is discussed, the device which is composed of laser module, liquid crystal modulation component, polarizer and photoelectric detect module is designed, which can get retardation and fast axial azimuth quickly and accurately. 4.Method to calibrate the measuring instrument of retardation and fast axial azimuth is proposed. It inverses the transfer matrix of device to realize the calibration. Experiments are carried out which verified the fviability of calibration method. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16965]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 顾帅妍. 基于液晶波片的相位延迟量和快轴方位角测量技术研究[D]. 中国科学院上海光学精密机械研究所. 2016. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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