用于激光损伤在线缺陷检测的远距离高分辨率系统设计
文献类型：学位论文
| 作者 | 翟婷婷 |
| 学位类别 | 硕士 |
| 答辩日期 | 2016 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 在线检测 大口径元件 远距离高分辨率 暗场成像 光学设计 |
| 其他题名 | Online Damage Inspection System Design for Large Aperture Optical Elements with High Resolution at Large Distance |
| 中文摘要 | 高功率激光装置中包括几千块大口径光学元件，元件昂贵，尤其是位于驱动器末端的终端集成光机组件，经常在接近其损伤阈值的高激光通量辐照情况下运行，极易损坏，从而限制了装置的输出能力，同时对工作人员的安全带了威胁。为了观察高功率激光装置中大口径光学元件的表面缺陷及内部损伤，对损伤形貌判定进而对损伤机理进行研究，评估晶体的抗激光破坏能力，有必要设计一套用于激光损伤大口径光学元件在线缺陷检测的远距离高分辨率系统，替代传统的准确度低、费时费力的人眼检查。目前国内尚未设计出一套针对高功率激光装置大口径光学元件高分辨率在线缺陷检测的完整的系统方案。 基于国内大型高功率激光驱动器对大口径光学元件损伤在线检测的需求，本论文对终端集成光机组件和远距离多程放大系统及传输反射镜在线检测系统和关键技术进行了深入研究及设计，全面研究、设计完整的针对FODI和LODI系统的在线检测光学方案，包括照明系统、成像系统、检测算法的研究和设计。系统地分析了难点，进行详细的分析并提出了解决方案，取得了以下研究成果： 一、在国内首次提出了完整的在线检测总体系统方案，包括对终端集成光机组件的FODI系统在线检测方案，和对远距离多程放大系统及传输反射镜的LODI系统在线检测方案。解决了国内大型高功率激光驱动器对大口径光学元件损伤在线检测的技术难题。 二、对远距离多程放大系统及传输反射镜的LODI在线检测外置照明系统，提出采用两级放大扩束镜，可以实现很大的放大倍数而使尺寸尽可能地小。采用锯齿型光阑和方孔结合用于照明系统，可消除高频衍射。 三、对终端集成光机组件的FODI在线检测系统（2-4m），提出了采用大变倍比的变焦成像系统，既可以等放大倍率观察400mm*400mm口径不同位置的光学元件，也可以放大同一位置光学元件的像以获得高分辨率的损伤性形貌图像。在2m工作距处最小分辨率为9.2um，4m工作距处最小分辨率为18.4um，观察整个全口径分辨率可达91.2um。 四、针对最常用的机械补偿变焦光学系统设计，提出了一种基于粒子群优化算法的变焦系统设计，可以将变焦系统一阶结构参数的求解转为在多维约束空间的数学优化问题，得到满足变焦需要的解，减小对光学设计者经验要求的依赖。 五、对远距离多程放大系统及传输反射镜的LODI在线检测系统（4-100m），提出了采用基于空间滤波器的内调焦望远成像系统，在望远系统的焦点处放置遮挡圆屏实现暗场成像，可以实现[2.5m,+∞)距离400mm*400mm口径不同位置光学元件的等精度、等分辨率检测，若采用1.053um主激光，分辨率为400um，若采用632.8nm外置激光光源，分辨率可达91.2um。 六、将一种基于TIE和角谱迭代算法的混合迭代算法应用于在线检测中大离焦范围情况的相位恢复，有很好的效果。 |
| 英文摘要 | Online damage inspection plays an important role in the research of high power laser device for ICF(Inertial Confinement Fusion). There are thousands of large aperture optical elements which are expensive and easy to be damaged when high power laser passed, especially for IOM (integrated optics module) at the target chamber. This will limit the output capacity of the device, while threatening the safety of the staff. So it is necessary to observe the morphology of surface defects and internal damages, and study the damage mechanism to evaluate the laser damage resistance of crystal. At present, there hasn’t been a complete design scheme for online damage inspection system with high resolution in high power laser facility interiorly.Based on the above requirement this Paper research the final optical damage inspection and key technologies indepth and the following teehnological advances have made: Firstly, we proposed the complete online detection system scheme firstly interiorly, including the FODI (final optics damage inspection) system and the LODI (laser optics damage inspection) system. Solve the technical problems of large aperture optical components damage online inspection of domestic large high power laser drive actuator. Secondly, the LODI system using back coherent illumination dark-field imaging with a two-stage beam expander. The serrated aperture and a square hole is used in conjunction with the lighting system can eliminate the high frequency diffraction. Third, for the FODI system arranged in 2-4 m, the distance and range is relatively small, we design a large zoom ratio imaging system, which can not only observe optical elements at different positions with same magnification, but also magnify the image of the same optical element at one postion with different resolution. The minimum resolution is 11um at 2m working distance, the minimum resolution is 22um at 4m working distance. Forth, this paper proposed a method based on particle swarm optimization algorithm for first-order structure design of continuous zoom lens system in order to reduce excessive dependence on designing experience. Search for the optimal solution in multi-dimensional constraint space. Fifth, for the LODI system arranged in 4-100m, we design a internal focusing telescope imaging system with spatial filter, which the resolution can up to 400um with the 1.053um main laser and 91.2um with the 632.8nm laser, and the working distance is [2.5m,+∞). Due to the magnification of telescope is fixed, the optical elements at different positions can be detected with same precision and resolution. The interior focusing is convenient and accurate to focusing and with small size compared with external focusing. Place a block round screen at the focal point of the telescope to achieve dark-field imaging. Change the depth of field through adjusting the aperture size, which can achieve a tilted optical element of different damages measurement, and reduce the influence of adjacent optical components. Sixth, we adopt a phase retrieval algorithm method for online inspection which combines transport of intensity equation with iterative angular spectrum propagation algorithm.This method can be used at large defocused distance. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16993]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 翟婷婷. 用于激光损伤在线缺陷检测的远距离高分辨率系统设计[D]. 中国科学院上海光学精密机械研究所. 2016. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。