中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
微下拉法晶体生长设备研制和晶体生长

文献类型:学位论文

作者王亚琦
学位类别硕士
答辩日期2016
授予单位中国科学院上海光学精密机械研究所
导师杭寅
关键词微下拉 晶体生长设备 晶体生长方法
其他题名Micro-pulling down crystal growth equipment development and crystal growth
中文摘要材料是工业发展的基石,晶体生长技术是材料科学的基础学科。晶体生长技术中,提拉法、坩埚下降法、浮区法(Cz法, Bridgman法, 和 Floating Zone法)已经被广泛的应用于研究和工业生产中,被公认为是经典实用的生长技术。随着激光、能源、信息、航天等一大批高新技术的发展,工业上需要具有更多不同特殊形态和性质的人工晶体,纤维晶体以其长径比高,晶向组织好,特殊的机械性能和力学性能等一系列优异的性质走进研究人员视野。上世纪90年代,微下拉法晶体生长由Tohoku大学Fukuda实验室创立,并得到了长足的发展,晶体材料相继在微下拉法晶体生长设备上成功生长,比如Si、LiNbO3、Y3Al5O12和 Al2O3 (sapphire)。另外,由于微下拉法晶体生长周期短,所需原料少,在研发新型晶体材料时可以节约大量时间成本和金钱,是现在研究新型晶体材料的重要手段之一。目前,微下拉技术主要集中在日本、法国、意大利等国家,国内尚未有成熟的技术,所以微下拉设备的研制应当得到我国晶体研究人员的重视。 本论文依据微下拉晶体生长工艺的要求,在课题组多年晶体研究工作的基础上自主研制微下拉晶体生长设备。通过坩埚和模具系统、温场保温系统、微下拉系统、炉膛真空系统、电源控制系统五大主要部分的研发,研制出试验样机,经过调试和晶体试样制备,对设备进行了参量优化,达到了较为理想的工作状态。 本课题还利用研发的微下拉晶体生长设备进行晶体试生长,成功生长出LiNbO3 和α-BBO 晶体,摸索出微下拉晶体生长晶体的一般工艺方法。
英文摘要Crystal growth is one of the basic disciplines of materials science, which determines industrial development.Crystal growth methods such as Czochralski, Bridgman, and floating zone are widely practiced in research and industry and are considered to be classic technologies from both fundamental and practical points of view.With a large number of high-tech development, laser,energy, information, aerospace, industrial need to have more different special form and nature of artificial crystal,Crystal fiber with its high aspect ratio, better crystal organization, a special series of excellent mechanical properties and mechanical properties comes into the field of vision of researchers. The micro-pulling-down technique was founded by the Tohoku University Fukuda Lab since 1900s, and has been considerable development, The growth and characterization of numerous crystals,including Si, LiNbO3, Y3Al5O12, and Al2O3 (sapphire),have been demonstrated. Besides, since the micro pulling-down method of crystal growth cycle is short, required less raw material, in the development of new crystalline material, can save a lot of time and money, is one of the important means to study new crystal materials. Currently, micro pulling-down technology mainly concentrated in Japan, France, Italy and other countries. The technology is not yet mature, Therefore, the development of micro pulling-down device should receive attention of crystals researchers. This paper based on micro pulling-down crystal growth process requirements, on the basis of years of our research work , research equipment on independent. Re serch by crucible and mold systems, temperature field insulation systems, micro pulling-down system, the chamber vacuum system,and power control system. Developed a test prototype, debug, and after crystal sample preparation, the equipment for the parameter optimization, to achieve a more satisfactory working condition. This topic also use the micro pulling-down crystal growth equipment for crystal growth test , LiNbO3 and α-BBO crystal have been grown,and worked out a general micro pulling-down process for crystal growth.
语种中文
源URL[http://ir.siom.ac.cn/handle/181231/17004]  
专题上海光学精密机械研究所_学位论文
推荐引用方式
GB/T 7714
王亚琦. 微下拉法晶体生长设备研制和晶体生长[D]. 中国科学院上海光学精密机械研究所. 2016.

入库方式: OAI收割

来源:上海光学精密机械研究所

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