基于激光相变热刻蚀效应的微纳结构制备
文献类型：学位论文
| 作者 | 周奇军 |
| 学位类别 | 硕士 |
| 答辩日期 | 2016 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 魏劲松 |
| 关键词 | 微纳结构 激光热刻蚀 相变材料 AgInSbTe Sb2Te3 |
| 其他题名 | Micro/nano-structure fabrication through laser thermal lithography effect |
| 中文摘要 | 衍射光学元件（DOEs）和微机电系统（MEMS）在光子学，电子学，信息科学和生物传感方面有着广泛的应用，并且在近几年成为了研究热点。作为DOEs和MEMS等功能器件必不可少的一部分——微纳结构，因此也受到了大量关注。尽管目前存在多种适合于制备微纳结构的材料，但相变材料因其在晶态与非晶态时的电阻率呈现出显著的差异而受到大量关注并且已经应用于DOEs和MEMS领域。此外，相变材料由于其独特的光学和电学性质被认定在数据存储与数据显示领域具有广泛的应用前景。因此，在相变材料上制备微纳结构具有十分重要的意义。在本论文中，我们采取了一种简单且有效的方法——激光热刻蚀技术，在相变材料AgInSbTe薄膜和Sb2Te3薄膜上制备了微纳结构。其主要内容如下： (1)对AgInSbTe薄膜激光作用区域与未作用区域在(NH4)2S溶液中的腐蚀特性进行了研究。结果表明AgInSbTe薄膜未经激光作用的非晶化区域腐蚀高度基本随腐蚀时间呈线性关系，腐蚀速率约为12.21nm/min，这高于经激光作用后的晶化区域在(NH4)2S溶液中腐蚀速率（约为1.2nm/min）。腐蚀选择比(γ)高达10.2，这已经高于其它的硫系相变材料，如As-S-Se (γ<1.6)，Ag-As-S-Se (γ<2.5)，Ge2Sb2Te5 (γ<4)等。探究了激光作用后，AgInSbTe薄膜的线宽与激光功率的关系，并且在AgInSbTe薄膜上制备了多种高分辨微纳结构。通过使用实验室自己搭建的激光直写装置，我们在AgInSbTe薄膜上以不同的功率制备了不同线宽的光栅线条微纳结构，并且发现线条线宽与激光功率基本成线性关系，通过激光功率对微纳结构进行线宽调控，制备得到了跨尺度针尖型微纳结构。此外制备了多种复杂图形，包括螺旋线，探针，五角星，同心圆，圆盘等以及制备了三阶浮雕微纳结构。 (2)对Sb2Te3薄膜激光作用区域与未作用区域在(NH4)2S溶液和NaOH溶液中的腐蚀特性进行了研究。结果表明Sb2Te3薄膜分别在(NH4)2S溶液和NaOH溶液中具有负性光刻胶和正性光刻胶的特性，这对于微纳结构制造较为有意义。在Sb2Te3薄膜制备了多种微纳结构并进行了灰度刻写。实验发现，当激光能量适当时，可以直接在Sb2Te3薄膜表面形成鼓泡状结构，进一步将激光能量增加出现烧蚀。此外，通过湿法刻蚀，以硫化铵溶液为刻蚀剂，制备了齿轮状微纳结构。最后在Sb2Te3薄膜上进行了灰度刻写，得到了小熊状灰度图形。 |
| 英文摘要 | Diffractive optical elements (DOEs) and micro-electro-mechanical systems (MEMS) have been hotspots in recent years for their broad applications in photonics, electronics, information technology, bio-sensing, etc. Micro/nano-structures, which are indispensable parts in DOEs and MEMS, has attracted increasing attention. Although there are various materials used in fabrication of micro/nano-structures, the phase-change materials (PCMs) have been attracting researchers’ attention and applied to DOEs and MEMS due to pronounced change in resistance between the amorphous and crystalline states. In addition, PCMs are confirmed to be promising in data storage, display and data visualization for the unique optical and electrical properties. Therefore, it is essential to fabricate micro/nano-structures on PCMs. In this dissertation, we employ a simple and effective technique, which is laser thermal lithography, to fabricate micro/nano-structures on AgInSbTe and Sb2Te3 thin films. The main is as follows. (1)The developing characteristics of irradiated and unirradiated regions of AgInSbTe thin film in ammonium sulfide solution were investigated. The etching height is approximately linear to etching time, and the etching rate of unirradiated region is about 12.21 nm/min, which is apparently faster than that of irradiated region (~1.20 nm/min). The etching selectivity ratio (γ) is about 10.2, which is higher than other PCMs, such as As-S-Se (γ<1.6), Ag-As-S-Se (γ<2.5), Ge2Sb2Te5 (γ<4), etc. Dependence of linewidth of AgInSbTe thin film on writing laser power was investigated and several high resolution micro/nano-structures were fabricated on the films. By our home-built laser direct writer, grating lines with different linewidths were fabricated at different laser power and the linewidth presents an approximately linear relationship with laser power. Based on the linewidth manipulation of micro/nano-structures, trans-scale structures have been fabricated. In addition, several complex micro/nano-structures consisting of spiral lines, probes, a pentagram, concentric rings, a disk and 3-level reliefs structures were fabricated. (2)The developing characteristics of irradiated and unirradiated regions of Sb2Te3 thin film in ammonium sulfide solution and sodium hydroxide solution were investigated. The results show that Sb2Te3 thin film possesses of both negative and positive photoresists in ammonium sulfide solution and sodium hydroxide solution respectively, which is useful in micro/nano-structure fabrication. Micro/nano-structures were fabricated and grayscale pattern were formed on Sb2Te3 thin films. The bump can be formed in certain conditions. With the laser energy increasing, the ablation occurs. Besides, gear structures were fabricated after developing in ammonium sulfide solution. Finally, a bear-shaped grayscale pattern were formed. |
| 语种 | 中文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17016]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 周奇军. 基于激光相变热刻蚀效应的微纳结构制备[D]. 中国科学院上海光学精密机械研究所. 2016. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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