Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system
文献类型：期刊论文
| 作者 | Sun, Jian; Zhang, Weili; Yi, Kui; Shao, Jianda |
| 刊名 | chin. opt. lett.
 |
| 出版日期 | 2014 |
| 卷号 | 12期号:5页码:53101 |
| 通讯作者 | zhang, wl (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china. |
| 英文摘要 | a model is developed to improve thickness uniformity of coatings on spherical substrates rapidly and automatically using fixed shadow masks in a planetary rotation system. the coating thickness is accurately represented by a function composed of basic thickness, self-shadow effect, and shadow mask function. a type of mask with parabolic contours is proposed, and the thickness uniformity of coatings on spherical substrates can be improved in a large range of ratios of clear aperture (ca) to radius of curvature (roc) by optimizing shadow masks using a numerical optimization algorithm. theoretically, the thickness uniformity improves to more than 97.5% of ca/roc from -1.9 to 1.9. experimentally, the thickness uniformities of coatings on a convex spherical substrate (ca/roc = 1.53) and on a concave spherical substrate (ca/roc=-1.65) improve to be better than 98.5% after corrected by the shadow masks. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13064]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Sun, Jian 2.Zhang, Weili 3.Yi, Kui 4.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 5.[Sun, Jian] Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun, Jian,Zhang, Weili,Yi, Kui,et al. Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system[J]. chin. opt. lett.,2014,12(5):53101. |
| APA | Sun, Jian,Zhang, Weili,Yi, Kui,&Shao, Jianda.(2014).Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system.chin. opt. lett.,12(5),53101. |
| MLA | Sun, Jian,et al."Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system".chin. opt. lett. 12.5(2014):53101. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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