Laser-induced damage properties of subwavelength antireflective grating on fused silica
文献类型:期刊论文
作者 | Du, Ying; Zhu, Meiping; Liu, Quan; Sui, Zhan; Yi, Kui; Jin, Yunxia; He, Hongbo |
刊名 | thin solid films
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出版日期 | 2014 |
卷号 | 567页码:47 |
关键词 | Fused silica grating Antireflection Holographic lithography Laser-induced damage threshold |
通讯作者 | he, hb (reprint author), shanghai inst opt & fine mech, key lab mat high power laser, 390 qinghe rd, shanghai 201800, peoples r china. |
英文摘要 | we describe the design, fabrication and performance of an optimized one-dimensional subwavelength grating for use in 1064 nm wavelength laser systems. the laser-induced damage threshold (lidt) under the irradiation of 12 ns 1064 nm pulses on the grating was performed, and a higher lidt was obtained compared with lidt of traditional antireflective coatings. laser irradiation produces some morphological modifications on grating. light interferometric surface profiler, scanning electron microscope and atomic force microscope were used to study these modifications, and these studies indicate the significant ablation and resolidification have occurred. to understand possible damage mechanisms, the role of electric field distribution inside the grating during the laser radiation process was investigated by a three-dimensional finite difference time-domain method, and the simulation result indicates the temperature distribution resulting from the internal electric field may be the main factor behind the damage. (c) 2014 elsevier b.v. all rights reserved. |
收录类别 | SCI |
语种 | 英语 |
版本 | 出版稿 |
源URL | [http://ir.siom.ac.cn/handle/181231/13325] ![]() |
专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
作者单位 | 1.[Du, Ying 2.Zhu, Meiping 3.Yi, Kui 4.Jin, Yunxia 5.He, Hongbo] Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 6.[Du, Ying] Zhejiang Univ Technol, Coll Sci, Hangzhou 310023, Zhejiang, Peoples R China 7.[Liu, Quan] S |
推荐引用方式 GB/T 7714 | Du, Ying,Zhu, Meiping,Liu, Quan,et al. Laser-induced damage properties of subwavelength antireflective grating on fused silica[J]. thin solid films,2014,567:47. |
APA | Du, Ying.,Zhu, Meiping.,Liu, Quan.,Sui, Zhan.,Yi, Kui.,...&He, Hongbo.(2014).Laser-induced damage properties of subwavelength antireflective grating on fused silica.thin solid films,567,47. |
MLA | Du, Ying,et al."Laser-induced damage properties of subwavelength antireflective grating on fused silica".thin solid films 567(2014):47. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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