中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Laser-induced damage properties of subwavelength antireflective grating on fused silica

文献类型:期刊论文

作者Du, Ying; Zhu, Meiping; Liu, Quan; Sui, Zhan; Yi, Kui; Jin, Yunxia; He, Hongbo
刊名thin solid films
出版日期2014
卷号567页码:47
关键词Fused silica grating Antireflection Holographic lithography Laser-induced damage threshold
通讯作者he, hb (reprint author), shanghai inst opt & fine mech, key lab mat high power laser, 390 qinghe rd, shanghai 201800, peoples r china.
英文摘要we describe the design, fabrication and performance of an optimized one-dimensional subwavelength grating for use in 1064 nm wavelength laser systems. the laser-induced damage threshold (lidt) under the irradiation of 12 ns 1064 nm pulses on the grating was performed, and a higher lidt was obtained compared with lidt of traditional antireflective coatings. laser irradiation produces some morphological modifications on grating. light interferometric surface profiler, scanning electron microscope and atomic force microscope were used to study these modifications, and these studies indicate the significant ablation and resolidification have occurred. to understand possible damage mechanisms, the role of electric field distribution inside the grating during the laser radiation process was investigated by a three-dimensional finite difference time-domain method, and the simulation result indicates the temperature distribution resulting from the internal electric field may be the main factor behind the damage. (c) 2014 elsevier b.v. all rights reserved.
收录类别SCI
语种英语
版本出版稿
源URL[http://ir.siom.ac.cn/handle/181231/13325]  
专题上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位1.[Du, Ying
2.Zhu, Meiping
3.Yi, Kui
4.Jin, Yunxia
5.He, Hongbo] Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
6.[Du, Ying] Zhejiang Univ Technol, Coll Sci, Hangzhou 310023, Zhejiang, Peoples R China
7.[Liu, Quan] S
推荐引用方式
GB/T 7714
Du, Ying,Zhu, Meiping,Liu, Quan,et al. Laser-induced damage properties of subwavelength antireflective grating on fused silica[J]. thin solid films,2014,567:47.
APA Du, Ying.,Zhu, Meiping.,Liu, Quan.,Sui, Zhan.,Yi, Kui.,...&He, Hongbo.(2014).Laser-induced damage properties of subwavelength antireflective grating on fused silica.thin solid films,567,47.
MLA Du, Ying,et al."Laser-induced damage properties of subwavelength antireflective grating on fused silica".thin solid films 567(2014):47.

入库方式: OAI收割

来源:上海光学精密机械研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。