Effects of substrate temperatures on the characterization of magnesium fluoride thin films in deep-ultraviolet region
文献类型：期刊论文
| 作者 | Sun, Jian; Shao, Jianda; Yi, Kui; Zhang, Weili |
| 刊名 | appl. optics
 |
| 出版日期 | 2014 |
| 卷号 | 53期号:7页码:1298 |
| 关键词 | ELECTRON-BEAM EVAPORATION OPTICAL-CONSTANTS OXYGEN SENSOR COATINGS MGF2 GROWTH MICROSTRUCTURE LITHOGRAPHY DEPOSITION BOAT |
| 通讯作者 | zhang, wl (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china. |
| 英文摘要 | as a low refractive index material widely used in coatings for deep-ultraviolet optical systems, magnesium fluoride (mgf2) films were prepared by electron beam evaporation at different substrate temperatures. the effects of the substrate temperatures on the optical properties in vacuum and in air, microstructures, and composition were investigated, as were the microstructures, their composition, and the relation between them. in vacuum, the substrate temperature directly affected the microstructures which dominated the packing density and inhomogeneity along the film thickness. when the films were exposed to air, the refractive index increased and a nonmonotonic change trend of the refractive index with substrate temperature was observed due to adsorbed water and magnesium oxide (mgo) formed in the film. while a moderate amount of mgo reduced absorption loss by decreasing vacancy defects, excessive mgo increased the absorption loss because of the high extinction coefficient of the oxide. (c) 2014 optical society of america |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13743]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Sun, Jian 2.Shao, Jianda 3.Yi, Kui 4.Zhang, Weili] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 5.[Sun, Jian] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun, Jian,Shao, Jianda,Yi, Kui,et al. Effects of substrate temperatures on the characterization of magnesium fluoride thin films in deep-ultraviolet region[J]. appl. optics,2014,53(7):1298. |
| APA | Sun, Jian,Shao, Jianda,Yi, Kui,&Zhang, Weili.(2014).Effects of substrate temperatures on the characterization of magnesium fluoride thin films in deep-ultraviolet region.appl. optics,53(7),1298. |
| MLA | Sun, Jian,et al."Effects of substrate temperatures on the characterization of magnesium fluoride thin films in deep-ultraviolet region".appl. optics 53.7(2014):1298. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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