Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique
文献类型：期刊论文
| 作者 | Wang Bin; Qi Hong-Ji; Sun Wei; He Jun; Zhao Jiao-Ling; Wang Hu; Hou Yong-Qiang |
| 刊名 | chin. phys. b
 |
| 出版日期 | 2014 |
| 卷号 | 23期号:11页码:117801 |
| 关键词 | birefringence dielectric thin films optical properties |
| 通讯作者 | qi, hj (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china. |
| 英文摘要 | the symmetric deposition technique is often used to improve the uniformity of sculptured thin film (stf). in this paper, optical properties of stf with the columnar angles +/-beta are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. then, the transmittances of uniformity monolayer and bilayer stf in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of stf. the inhomogeneity of stf is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer stf deposited in symmetric style. the results show that optical homogeneity of stf can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13763]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Wang Bin 2.Qi Hong-Ji 3.Sun Wei 4.He Jun 5.Zhao Jiao-Ling 6.Wang Hu 7.Hou Yong-Qiang] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 8.[Wang Bin 9.Sun Wei 10.He Jun |
| 推荐引用方式 GB/T 7714 | Wang Bin,Qi Hong-Ji,Sun Wei,et al. Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique[J]. chin. phys. b,2014,23(11):117801. |
| APA | Wang Bin.,Qi Hong-Ji.,Sun Wei.,He Jun.,Zhao Jiao-Ling.,...&Hou Yong-Qiang.(2014).Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique.chin. phys. b,23(11),117801. |
| MLA | Wang Bin,et al."Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique".chin. phys. b 23.11(2014):117801. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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