Fabrication of broadband, high-efficiency, metal-multilayer-dielectric gratings
文献类型：期刊论文
| 作者 | Chen, Hui; Guan, Heyuan; Zeng, Lijiang; Jin, Yunxia |
| 刊名 | opt. commun.
 |
| 出版日期 | 2014 |
| 卷号 | 329页码:103 |
| 关键词 | Diffraction grating Pulse compression Microstructure fabrication Metal-multilayer-dielectric grating |
| 通讯作者 | chen, h (reprint author), tsinghua univ, dept precis instrument, state key lab precis measurement technol & instru, beijing 100084, peoples r china. |
| 英文摘要 | fabrication procedures and testing results of broadband, high-efficiency, metal-multilayer-dielectric gratings (mmdg) for high power laser pulse compression applications are reported. gratings of 1740 line/mm line density to operate at 53 degrees incident angle and te polarization were engraved in the top three layers of metal-multilayer-dielectric substrates. the groove depth was controlled to be between 310 nm and 320 nm by monitoring the diffraction efficiency of grating at-1st-order in littrow mounting using a he-ne laser with a wavelength of 632.8 nm. the duty cycles of masks was controlled with a range from 0.14 to 0.17 and the duly cycles of mmdgs was controlled with a range from 0.15 to 0.19. the bandwidth of a fabricated mmdg at a level of diffraction efficiency higher than 90% was 169 nm and the peak value was 95.1% at wavelength of 810 nm. (c) 2014 elsevier b.v. all rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/13794]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Chen, Hui 2.Zeng, Lijiang] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China 3.[Guan, Heyuan 4.Jin, Yunxia] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser |
| 推荐引用方式 GB/T 7714 | Chen, Hui,Guan, Heyuan,Zeng, Lijiang,et al. Fabrication of broadband, high-efficiency, metal-multilayer-dielectric gratings[J]. opt. commun.,2014,329:103. |
| APA | Chen, Hui,Guan, Heyuan,Zeng, Lijiang,&Jin, Yunxia.(2014).Fabrication of broadband, high-efficiency, metal-multilayer-dielectric gratings.opt. commun.,329,103. |
| MLA | Chen, Hui,et al."Fabrication of broadband, high-efficiency, metal-multilayer-dielectric gratings".opt. commun. 329(2014):103. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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