Anisotropic Laser-Induced Damage Threshold and Residual Stress of TiO2 Sculptured Thin Films
文献类型:期刊论文
作者 | Xiao, Xiudi; Miao, Lei; Zhang, Ming; Xu, Gang; Shao, Jianda; Fan, Zhengxiu |
刊名 | j. nanosci. nanotechnol.
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出版日期 | 2013 |
卷号 | 13期号:2页码:824 |
通讯作者 | xiao, xd (reprint author), chinese acad sci, guangzhou inst energy convers, key lab renewable energy & gas hydrates, guangzhou 510640, guangdong, peoples r china. |
英文摘要 | the residual stress and laser-induced damage threshold (lidt) of tio2 sculptured thin films prepared by glancing angle electron beam evaporation were studied. uv-vis-nir spectra and optical interferometer were employed to characterize the optical and mechanical properties, respectively. optical microscopy and raman spectra were used to observe damage morphology and analyze damage microstructure, respectively. it was found that the residual stress changed from compressive into tensile with increasing deposition angle. the lidt was anisotropic with p- and s-polarization light, which was due to the anisotropic nanostructure and optical properties. simultaneously, an optimum deposition angle for the maximum threshold of tio2 film was about 60 degrees. the mechanism of laser-induced damage was thermal in nature. the process of thermal damage with crystallization is proved by raman spectra. |
收录类别 | SCI |
语种 | 英语 |
版本 | 出版稿 |
源URL | [http://ir.siom.ac.cn/handle/181231/14647] ![]() |
专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
作者单位 | 1.[Xiao, Xiudi 2.Miao, Lei 3.Zhang, Ming 4.Xu, Gang] Chinese Acad Sci, Guangzhou Inst Energy Convers, Key Lab Renewable Energy & Gas Hydrates, Guangzhou 510640, Guangdong, Peoples R China 5.[Xiao, Xiudi 6.Shao, Jianda 7.Fan, Zhengxiu] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China |
推荐引用方式 GB/T 7714 | Xiao, Xiudi,Miao, Lei,Zhang, Ming,et al. Anisotropic Laser-Induced Damage Threshold and Residual Stress of TiO2 Sculptured Thin Films[J]. j. nanosci. nanotechnol.,2013,13(2):824. |
APA | Xiao, Xiudi,Miao, Lei,Zhang, Ming,Xu, Gang,Shao, Jianda,&Fan, Zhengxiu.(2013).Anisotropic Laser-Induced Damage Threshold and Residual Stress of TiO2 Sculptured Thin Films.j. nanosci. nanotechnol.,13(2),824. |
MLA | Xiao, Xiudi,et al."Anisotropic Laser-Induced Damage Threshold and Residual Stress of TiO2 Sculptured Thin Films".j. nanosci. nanotechnol. 13.2(2013):824. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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