中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses

文献类型:期刊论文

作者Zhu, Meiping; Yi, Kui; Du, Ying; Qi, Hongji; Zhang, Weili; Shao, Jianda
刊名vacuum
出版日期2013
卷号97页码:44
通讯作者zhu, mp (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要we present a monitoring strategy based on using two pieces of witness glass, which are brought to the measuring position in a specially chosen sequence, each witness glass is monitored by one single wavelength. to reduce the thickness error, some thick layers are divided into two layers and monitored by different witness glasses. theoretical analysis and experimental results have demonstrated that the proposed monitoring strategy can achieve spectral performance close to the theoretical design. (c) 2013 elsevier ltd. all rights reserved.
收录类别SCI
语种英语
版本出版稿
源URL[http://ir.siom.ac.cn/handle/181231/14840]  
专题上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位1.[Zhu, Meiping
2.Yi, Kui
3.Du, Ying
4.Qi, Hongji
5.Zhang, Weili
6.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power laser, Shanghai 201800, Peoples R China
推荐引用方式
GB/T 7714
Zhu, Meiping,Yi, Kui,Du, Ying,et al. Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses[J]. vacuum,2013,97:44.
APA Zhu, Meiping,Yi, Kui,Du, Ying,Qi, Hongji,Zhang, Weili,&Shao, Jianda.(2013).Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses.vacuum,97,44.
MLA Zhu, Meiping,et al."Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses".vacuum 97(2013):44.

入库方式: OAI收割

来源:上海光学精密机械研究所

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