Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses
文献类型:期刊论文
作者 | Zhu, Meiping; Yi, Kui; Du, Ying; Qi, Hongji; Zhang, Weili; Shao, Jianda |
刊名 | vacuum
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出版日期 | 2013 |
卷号 | 97页码:44 |
通讯作者 | zhu, mp (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china. |
英文摘要 | we present a monitoring strategy based on using two pieces of witness glass, which are brought to the measuring position in a specially chosen sequence, each witness glass is monitored by one single wavelength. to reduce the thickness error, some thick layers are divided into two layers and monitored by different witness glasses. theoretical analysis and experimental results have demonstrated that the proposed monitoring strategy can achieve spectral performance close to the theoretical design. (c) 2013 elsevier ltd. all rights reserved. |
收录类别 | SCI |
语种 | 英语 |
版本 | 出版稿 |
源URL | [http://ir.siom.ac.cn/handle/181231/14840] ![]() |
专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
作者单位 | 1.[Zhu, Meiping 2.Yi, Kui 3.Du, Ying 4.Qi, Hongji 5.Zhang, Weili 6.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power laser, Shanghai 201800, Peoples R China |
推荐引用方式 GB/T 7714 | Zhu, Meiping,Yi, Kui,Du, Ying,et al. Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses[J]. vacuum,2013,97:44. |
APA | Zhu, Meiping,Yi, Kui,Du, Ying,Qi, Hongji,Zhang, Weili,&Shao, Jianda.(2013).Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses.vacuum,97,44. |
MLA | Zhu, Meiping,et al."Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses".vacuum 97(2013):44. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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