The figure simulation of the polishing pad in the continuous polishing process
文献类型：会议论文
| 作者 | Shan, Haiyang; Xu, Xueke; He, Hongbo; Liu, Shijie; Wei, Chaoyang; Yi, Kui; Shao, Jianda |
| 出版日期 | 2014 |
| 会议名称 | conference on pacific rim laser damage (pld) on optical materials for high power lasers |
| 通讯作者 | shan, hy (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china. |
| 英文摘要 | the figures of the polishing pad are of great significance for the figures of optical workpieces in the continuous polishing process. three main factors which affect the figures of the pad, including the polishing pad creep deformation, the calibration plate grinding and the ambient change in temperature, are analyzed in this work. processing parameters including the eccentricity between the polishing pad and the calibration plate, the calibration plate thickness, angular velocities of the pad are introduced in this analytic process. with this method, the figures of the polishing pad in the continuous polishing can be obtained. this work provides theoretical guidance for the deterministic processing of the continuous polishing process. |
| 收录类别 | CPCI |
| 会议录 | pacific rim laser damage 2014: optical materials for high power lasers
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17042]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Shan, Haiyang 2.Xu, Xueke 3.He, Hongbo 4.Liu, Shijie 5.Wei, Chaoyang 6.Yi, Kui 7.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 8.[Shan, Haiyang] Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shan, Haiyang,Xu, Xueke,He, Hongbo,et al. The figure simulation of the polishing pad in the continuous polishing process[C]. 见:conference on pacific rim laser damage (pld) on optical materials for high power lasers. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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