Influence of thickness and annealing temperature on the structure properties of random mask deposited by magnetron sputtering
文献类型：会议论文
| 作者 | Zhao, Jiaoling; Wang, Hu; He, Hongbo; Qi, Hongji; Zhang, Weili; Chai, Yingjie; Guo, Jialu |
| 出版日期 | 2015 |
| 会议名称 | 4th pacific rim laser damage symposium on optical materials for high-power lasers |
| 通讯作者 | zhao, jl (reprint author), shanghai inst opt & fine mech, key lab mat high power laser, 390 qinghe rd, shanghai 201800, peoples r china. |
| 英文摘要 | the structure properties of random mask of antireflective structure prepared by the thermal dewetting process are investigated. as a low-cost and large-scale technique, the mask obtained in our work has a great prospect in the field of solar cell and high power laser system. ultrathin films of amorphous ag are deposited on the fused silica by magnetron sputtering. by fast thermal annealing the structures in ag film are agglomerated on the substrate and form mask. the influence of different thickness and annealing temperature on the structure properties of random mask are studied. the surface morphologies are characterized by scanning electronic microscopy. the suitable conditions to obtain excellent quality ag nanomasks with the pebble particles are achieved. |
| 收录类别 | CPCI |
| 会议录 | pacific rim laser damage 2015: optical materials for high-power lasers
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17049]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Zhao, Jiaoling 2.Wang, Hu 3.He, Hongbo 4.Qi, Hongji 5.Zhang, Weili 6.Chai, Yingjie 7.Guo, Jialu] Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 8.[Zhao, Jiaoling 9.Wang, Hu 10.Chai, Yingjie |
| 推荐引用方式 GB/T 7714 | Zhao, Jiaoling,Wang, Hu,He, Hongbo,et al. Influence of thickness and annealing temperature on the structure properties of random mask deposited by magnetron sputtering[C]. 见:4th pacific rim laser damage symposium on optical materials for high-power lasers. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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