The simulation of workpieces' surface in polishing
文献类型：会议论文
| 作者 | Wu, Lunzhe; Xu, Xueke; Yang, Minghong; Wei, Chaoyang; Liu, Shijie; Shao, Jianda |
| 出版日期 | 2015 |
| 会议名称 | conference on optifab |
| 通讯作者 | xu, xk (reprint author), chinese acad sci, shanghai inst opt & fine mech, 390 qinghe rd, shanghai 201800, peoples r china. |
| 英文摘要 | dynamic mechanical analysis (dma) and bending beam rheometer (bbr) are applied to detect the property of the polishing pitch and get the creep compliance combining the craftwork of polishing. the simulation of workpieces' surface in polishing is completed based on the preston formula, boltzmann superposition principle and boltzmann superposition principle. a v-curve is gotten on studying the pv's time history of the polished workpiece. meanwhile, a confirmatory experiment whose parameter is agree with the simulation is completed, which the optimum result of pv, 0.3. (lambda=623.8nm) is similar with the optimum result of pv by simulation, 0.27 lambda. a resemble simulated surface is gotten on the same pv with the experiment. |
| 收录类别 | CPCI |
| 会议录 | optifab 2015
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17061]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Wu, Lunzhe] Shanghai Univ, Shanghai 201800, Peoples R China 2.[Xu, Xueke 3.Yang, Minghong 4.Wei, Chaoyang 5.Liu, Shijie 6.Shao, Jianda] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, 390 Qinghe Rd, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wu, Lunzhe,Xu, Xueke,Yang, Minghong,et al. The simulation of workpieces' surface in polishing[C]. 见:conference on optifab. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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