The Real-Time Monitoring Surface Figure of Optical Elements in Continuous Polishing
文献类型：会议论文
| 作者 | Chen, Jun; Xu, Xueke; Wei, Chaoyang; Gu, Jianxun; Dun, Aihuan; Shao, Jianda |
| 出版日期 | 2014 |
| 会议名称 | 7th international symposium on advanced optical manufacturing and testing technologies (aomatt) - advanced optical manufacturing technologies |
| 通讯作者 | chen, j (reprint author), shanghai inst opt & fine mech, 390 qinghe rd, shanghai 201800, peoples r china. |
| 英文摘要 | continuous ring polishing is the key process in large aperture optical elements. the surface figure of polishing pad is inferred by the offline testing surface figure of workpiece. the defects, low processing efficiency and uncertainty processing time in traditional continuous polishing, the real-time monitoring method of polishing is proposed. the realtime monitoring system is set up based on the computer, the dynamic interferometer, a beam expanding system and a beam reflecting system. there are a workpiece and a glass monitoring plate placing in same ring. the surface figure of workpiece, monitored by the monitoring plate, synchronize with the surface of glass monitoring plate in peak-valley (pv) and power. the new method with simple structure is fast measuring and judgmental directly to the changes of surface figures. the results of real-time monitoring and surface figure converging on the workpiece are valid for continuous polishing through experimental validation. |
| 收录类别 | CPCI |
| 会议录 | 7th international symposium on advanced optical manufacturing and testing technologies: advanced optical manufacturing technologies
 |
| 会议录出版者 | spie-int soc optical engineering |
| 语种 | 英语 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/17063]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 1.[Chen, Jun 2.Xu, Xueke 3.Wei, Chaoyang 4.Gu, Jianxun 5.Dun, Aihuan 6.Shao, Jianda] Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China |
| 推荐引用方式 GB/T 7714 | Chen, Jun,Xu, Xueke,Wei, Chaoyang,et al. The Real-Time Monitoring Surface Figure of Optical Elements in Continuous Polishing[C]. 见:7th international symposium on advanced optical manufacturing and testing technologies (aomatt) - advanced optical manufacturing technologies. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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