Annular Force Based Variable Curvature Mirror Combined with Multi-point Actuation Array to Improve the Surface Figure Accuracy: A Prototype Design
文献类型:会议论文
作者 | Zhao, Hui1; Xie, Xiaopeng2; Ren, Guorui1; Du, Yunfei1; Liu, Meiying1; Wei, Jingxuan3 |
出版日期 | 2016 |
会议名称 | 8th international symposium on advanced optical manufacturing and testing technologies - advanced optical manufacturing technologies |
会议日期 | 2016-04-26 |
会议地点 | suzhou, peoples r china |
关键词 | variable curvature mirror saggitus variation surface figure accuracy piezoelectric actuation array |
卷号 | 9683 |
通讯作者 | zhao, h (reprint author), chinese acad sci, xian inst opt & precis mech, xian 710119, peoples r china. |
英文摘要 | in recent years, a novel optical zooming technique has been paid much attention. with the help of optical leveraging effect, it is possible to alter the system focal length dramatically without moving elements involved in by only changing the curvature radius of vcm (variable curvature mirror) slightly. with no doubt, vcm is the key to realize non-moving element optical zooming and it has to provide large enough saggitus variation while still maintaining the high surface figure accuracy to ensure high-quality imaging. in our previously published paper, an annular force based vcm has been designed, fabricated and tested. experiments demonstrate that with the aperture of 100mm and thickness of 2mm, the vcm could generate a large saggitus variation exceeding 30. (lambda=632.8nm). however, the optical quality degrades very fast and this makes such a vcm unsuitable for optical imaging in visible band. therefore in this manuscript, a multipoint actuation array, which is composed of totally 49 piezoelectric actuators, is embedded into the annular structure to aim to correct the surface figure distortion caused by large saggitus variation. the new structure model has been designed and numerical simulation indicates that the surface figure distortion could be well corrected as long as the degraded surface figure accuracy is better than 1.8. (lambda=632.8nm) (rms). based on this, a new prototype vcm is being fabricated and intermediate results are reported here. |
收录类别 | EI ; ISTP |
产权排序 | 1 |
会议录 | advanced optical manufacturing technologies
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会议录出版者 | spie-int soc optical engineering |
学科主题 | optics ; physics, applied |
会议录出版地 | bellingham |
语种 | 英语 |
ISSN号 | 0277-786x |
ISBN号 | 978-1-62841-918-4 |
源URL | [http://ir.opt.ac.cn/handle/181661/28493] ![]() |
专题 | 西安光学精密机械研究所_空间光学应用研究室 |
作者单位 | 1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Xian 710119, Peoples R China 2.Chinese Acad Sci, Grad Sch Univ, Beijing 100049, Peoples R China 3.Xidian Univ, Sch Comp Sci & Technol, Xian 710071, Peoples R China |
推荐引用方式 GB/T 7714 | Zhao, Hui,Xie, Xiaopeng,Ren, Guorui,et al. Annular Force Based Variable Curvature Mirror Combined with Multi-point Actuation Array to Improve the Surface Figure Accuracy: A Prototype Design[C]. 见:8th international symposium on advanced optical manufacturing and testing technologies - advanced optical manufacturing technologies. suzhou, peoples r china. 2016-04-26. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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