中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
The Impact of Fabrication Errors of Double-layer BOE on Diffraction Efficiency

文献类型:会议论文

作者Ma Zebin1,2; Kang Fuzeng1; Wang Hao1,2
出版日期2016
会议名称8th international symposium on advanced optical manufacturing and testing technologies (aomatt) - design, manufacturing, and testing of micro- and nano-optical devices and systems; and smart structures and materials
会议日期2016-04-26
会议地点suzhou, peoples r china
关键词Diffractive optical element Double-layer BOE Diffraction efficiency
卷号9685
通讯作者ma, zb (reprint author), chinese acad sci, xian inst opt & precis mech, state key lab transient opt & photon, xian, peoples r china.
英文摘要

with the development of optical technology, optical instruments become smaller and more integrated. because of the high diffraction efficiency and light weight, binary optical elements become more and more popular. binary optical element can only blaze at one wavelength, it has high diffraction efficiency at design wavelength. but the diffraction efficiency of binary optical elements will decrease quickly with the change of wavelength. and this situation will have big impact on image quality. since double-layer boe can blaze at two wavelengths, it has high diffraction efficiency at wide spectral bandwidth. there are kinds of fabrication errors. based on scalar diffraction theory, this paper analyzes the diffraction efficiency of double-layer boe with fabrication errors and simulates it in matlab. simulation shows the diffraction efficiency decreases quickly if the depth errors of two layers are opposite, and this situation should avoid. as for periodic errors, tilt errors and angular errors, these fabrication errors have different impact of double-layer boe on diffraction efficiency.

收录类别EI ; ISTP
产权排序1
会议录8th international symposium on advanced optical manufacturing and testing technologies: design, manufacturing, and testing of micro- and nano-optical devices and systems; and smart structures and materials
会议录出版者spie-int soc optical engineering
学科主题optics ; physics, applied
会议录出版地bellingham
语种英语
ISSN号0277-786x
ISBN号978-1-62841-920-7
源URL[http://ir.opt.ac.cn/handle/181661/28461]  
专题西安光学精密机械研究所_瞬态光学技术国家重点实验室
作者单位1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian, Peoples R China
2.Univ Chinese Acad Sci, Beijing, Peoples R China
推荐引用方式
GB/T 7714
Ma Zebin,Kang Fuzeng,Wang Hao. The Impact of Fabrication Errors of Double-layer BOE on Diffraction Efficiency[C]. 见:8th international symposium on advanced optical manufacturing and testing technologies (aomatt) - design, manufacturing, and testing of micro- and nano-optical devices and systems; and smart structures and materials. suzhou, peoples r china. 2016-04-26.

入库方式: OAI收割

来源:西安光学精密机械研究所

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