The Impact of Fabrication Errors of Double-layer BOE on Diffraction Efficiency
文献类型:会议论文
作者 | Ma Zebin1,2; Kang Fuzeng1![]() |
出版日期 | 2016 |
会议名称 | 8th international symposium on advanced optical manufacturing and testing technologies (aomatt) - design, manufacturing, and testing of micro- and nano-optical devices and systems; and smart structures and materials |
会议日期 | 2016-04-26 |
会议地点 | suzhou, peoples r china |
关键词 | Diffractive optical element Double-layer BOE Diffraction efficiency |
卷号 | 9685 |
通讯作者 | ma, zb (reprint author), chinese acad sci, xian inst opt & precis mech, state key lab transient opt & photon, xian, peoples r china. |
英文摘要 | with the development of optical technology, optical instruments become smaller and more integrated. because of the high diffraction efficiency and light weight, binary optical elements become more and more popular. binary optical element can only blaze at one wavelength, it has high diffraction efficiency at design wavelength. but the diffraction efficiency of binary optical elements will decrease quickly with the change of wavelength. and this situation will have big impact on image quality. since double-layer boe can blaze at two wavelengths, it has high diffraction efficiency at wide spectral bandwidth. there are kinds of fabrication errors. based on scalar diffraction theory, this paper analyzes the diffraction efficiency of double-layer boe with fabrication errors and simulates it in matlab. simulation shows the diffraction efficiency decreases quickly if the depth errors of two layers are opposite, and this situation should avoid. as for periodic errors, tilt errors and angular errors, these fabrication errors have different impact of double-layer boe on diffraction efficiency. |
收录类别 | EI ; ISTP |
产权排序 | 1 |
会议录 | 8th international symposium on advanced optical manufacturing and testing technologies: design, manufacturing, and testing of micro- and nano-optical devices and systems; and smart structures and materials
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会议录出版者 | spie-int soc optical engineering |
学科主题 | optics ; physics, applied |
会议录出版地 | bellingham |
语种 | 英语 |
ISSN号 | 0277-786x |
ISBN号 | 978-1-62841-920-7 |
源URL | [http://ir.opt.ac.cn/handle/181661/28461] ![]() |
专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
作者单位 | 1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian, Peoples R China 2.Univ Chinese Acad Sci, Beijing, Peoples R China |
推荐引用方式 GB/T 7714 | Ma Zebin,Kang Fuzeng,Wang Hao. The Impact of Fabrication Errors of Double-layer BOE on Diffraction Efficiency[C]. 见:8th international symposium on advanced optical manufacturing and testing technologies (aomatt) - design, manufacturing, and testing of micro- and nano-optical devices and systems; and smart structures and materials. suzhou, peoples r china. 2016-04-26. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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