Tumor hypoxia is a negative prognostic factor in cancer radiotherapy, due in part to its role in causing resistance to radiotherapy. It has attracted extensive critical attention to radiation sensitizers by using active oxygen to improve radiotherapy outcome. Active oxygen delivery functional materials are promising candidates to transport active oxygen to tumor cells. Herein, we report an oxygen delivery functional material by using hollow mesoporous silica nanoparticles (HMSNs) as carriers, synthesizing sodium percarbonate (SPC) in the channels and cavity of HMSNs (SPC@HMSNs) and coating polyacrylic acid (PAA) on the functional materials (SPC@HMSNs-PAA). SPC@HMSNs-PAA could release more SPC in a simulated tumor acidic microenvironment (pH similar to 6.5), which can provide oxygen to improve radiotherapy outcome even under low energy X-ray irradiation. The events induce obvious overproduction of reactive oxygen radicals to kill cancer cells with a significant effect. Meanwhile, no obvious cytotoxicity was observed when SPC@HMSNs-PAA applied alone. The radiosensitization of SPC@HMSNs-PAA on cancer cells, even exposure to low-energy X-ray irradiation, may suggest promising application in radiotherapy.