中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils

文献类型:期刊论文

作者Yanhua Fan; Shuhui Yu; Rong Sun; Lei Li; Yansheng Yin; Ka-Wai Wong; Ruxu Du
刊名Applied Surface Science
出版日期2010
卷号256期号:22页码:6531-6535
英文摘要Ba(0.7-x)Sr(0.3)Mn(x)TiO(3) (x = 0, 0.025, 0.05) thin films have been prepared on copper foils using sol-gel method. The films were processed in an atmosphere with low oxygen pressure so that the substrate oxidation is avoided and the formation of the perovskite phase is allowed. XRD and SEM results showed that Mn doping enhanced the crystallization of the perovskite phase in the films. TheMnsubstitution prevents the reduction of Ti(4+) to Ti(3+), which is supported by XPS analysis. The Ba(0.7-x)Sr(0.3)Mn(x)TiO(3) film with x = 0.025 (BSMT25) exhibits preferred dielectric behavior and a lower leakage current density among the three thin films. The dielectric constant and loss of the BSMT25 film are 1213.5 and 0.065 at 1MHz and around zero field, which are mostly desired for embedded capacitor applications. The mechanism of Mn doping on improving the electrical properties of barium strontium titanate (BST) thin films was investigated.
收录类别SCI
原文出处http://www.sciencedirect.com/science/article/pii/S0169433210005544#
语种英语
源URL[http://ir.siat.ac.cn:8080/handle/172644/2733]  
专题深圳先进技术研究院_集成所
作者单位Applied Surface Science
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Yanhua Fan,Shuhui Yu,Rong Sun,et al. Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils[J]. Applied Surface Science,2010,256(22):6531-6535.
APA Yanhua Fan.,Shuhui Yu.,Rong Sun.,Lei Li.,Yansheng Yin.,...&Ruxu Du.(2010).Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils.Applied Surface Science,256(22),6531-6535.
MLA Yanhua Fan,et al."Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils".Applied Surface Science 256.22(2010):6531-6535.

入库方式: OAI收割

来源:深圳先进技术研究院

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