Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method
文献类型：期刊论文
| 作者 | Zhao ning; Wan lixi; Cao liqiang; Yu daquan; Yu shuhui; Sun rong |
| 刊名 | Materials Letters
 |
| 出版日期 | 2011 |
| 卷号 | 65期号:23页码:3574-3576 |
| 英文摘要 | Polycrystalline BaTiO3/Ba0.6Sr0.4TiO3/SrTiO3 (BT/BST/ST) multilayer thin films with different periodicities have been deposited on Pt/Ti/SiO2/Si substrates by using a sol–gel method. The multilayer thin films were crack free, compact and crystallized in a perovskite structure. The dielectric constant of the multilayer thin films was significantly increased and the dielectric loss was almost the same as those of uniform BT, ST and BST thin films. The dielectric constant increased with increasing stacking periodicity as the thickness of each individual layer decreased. The multilayer thin films showed excellent dielectric properties and can be promisingly used for the dielectric layer of silicon-based embedded capacitors in package substrate. |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/S0167577X11008998 |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/3236]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 作者单位 | Materials Letters |
| 推荐引用方式 GB/T 7714 | Zhao ning,Wan lixi,Cao liqiang,et al. Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method[J]. Materials Letters,2011,65(23):3574-3576. |
| APA | Zhao ning,Wan lixi,Cao liqiang,Yu daquan,Yu shuhui,&Sun rong.(2011).Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method.Materials Letters,65(23),3574-3576. |
| MLA | Zhao ning,et al."Dielectric enhancement of BaTiO 3/BaSrTiO 3/SrTiO 3 multilayer thin films deposited on Pt/Ti/SiO 2/Si substrates by sol–gel method".Materials Letters 65.23(2011):3574-3576. |
入库方式： OAI收割
来源：深圳先进技术研究院
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