Annealing effect on the electrical properties and microstructure of embedded Ni–Cr thin film resistor
文献类型：期刊论文
| 作者 | Lai, Lifei; Zeng, Wenjin; Fu, Xianzhu; Sun,Rong; Du, RX |
| 刊名 | JOURNAL OF ALLOYS AND COMPOUNDS
 |
| 出版日期 | 2012 |
| 英文摘要 | Ni–Cr (80/20 at.%) alloy was deposited on the copper foil substrate as embedded thin film resistor (ETFR) materials by DC magnetron sputtering method. Electrical properties and microstructure of Ni–Cr ETFR under different annealing conditions were investigated. Results indicated that the ETFR exhibited the smallest temperature coefficient of resistance (TCR) after annealing at 250 °C for 540 s in N2. The structure, stress, composition and surface morphology of ETFR materials were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), energy dispersive spectroscopy (EDS) and atomic force microscopy (AFM). The rarely reported hexagonal Ni (0 1 1), (0 0 2) and (1 0 3) in Ni–Cr thin film were found in Ni–Cr (80/20 at.%) ETFR materials. The chemical states on the surface of the ETFR materials after annealing were mainly Cr2O3. The segregation of chromium during annealing can affect the resistivity and temperature coefficient of resistance (TCR). The different surface morphology of ETFR in annealing will affect the resistivity. |
| 收录类别 | SCI |
| 原文出处 | http://www.sciencedirect.com/science/article/pii/S0925838812009437 |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/3744]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 作者单位 | JOURNAL OF ALLOYS AND COMPOUNDS |
| 推荐引用方式 GB/T 7714 | Lai, Lifei,Zeng, Wenjin,Fu, Xianzhu,et al. Annealing effect on the electrical properties and microstructure of embedded Ni–Cr thin film resistor[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2012. |
| APA | Lai, Lifei,Zeng, Wenjin,Fu, Xianzhu,Sun,Rong,&Du, RX.(2012).Annealing effect on the electrical properties and microstructure of embedded Ni–Cr thin film resistor.JOURNAL OF ALLOYS AND COMPOUNDS. |
| MLA | Lai, Lifei,et al."Annealing effect on the electrical properties and microstructure of embedded Ni–Cr thin film resistor".JOURNAL OF ALLOYS AND COMPOUNDS (2012). |
入库方式： OAI收割
来源：深圳先进技术研究院
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