Multi-physics simulation and fabrication of acompact 128 × 128 micro-electro-mechanicalsystem Fabry–Perot cavity tunable filterarray for infrared hyperspectral imager
文献类型：期刊论文
| 作者 | Qinghua Meng; Sihai Chen; Jianjun Lai; Ying Huang; Zhenjun Sun |
| 刊名 | Applied Optics
 |
| 出版日期 | 2015 |
| 英文摘要 | This paper demonstrates the design and fabrication of a 128 × 128 micro-electro-mechanical systems Fabry–Perot (F–P) cavity filter array, which can be applied for the hyperspectral imager. To obtain better mechanical performance of the filters, F–P cavity supporting structures are analyzed by multi-physics finite element modeling. The simulation results indicate that Z-arm is the key component of the structure. The F–P cavity array with Z-arm structures was also fabricated. The experimental results show excellent parallelism of the bridge deck, which agree with the simulation results. A conclusion is drawn that Z-arm supporting structures are important to hyperspectral imaging system, which can achieve a large tuning range and high fill factor compared to straight arm structures. The filter arrays have the potential to replace the traditional dispersive element |
| 收录类别 | SCI |
| 原文出处 | http://dx.doi.org/10.1364/AO.54.006850 |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/6592]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 作者单位 | Applied Optics |
| 推荐引用方式 GB/T 7714 | Qinghua Meng,Sihai Chen,Jianjun Lai,et al. Multi-physics simulation and fabrication of acompact 128 × 128 micro-electro-mechanicalsystem Fabry–Perot cavity tunable filterarray for infrared hyperspectral imager[J]. Applied Optics,2015. |
| APA | Qinghua Meng,Sihai Chen,Jianjun Lai,Ying Huang,&Zhenjun Sun.(2015).Multi-physics simulation and fabrication of acompact 128 × 128 micro-electro-mechanicalsystem Fabry–Perot cavity tunable filterarray for infrared hyperspectral imager.Applied Optics. |
| MLA | Qinghua Meng,et al."Multi-physics simulation and fabrication of acompact 128 × 128 micro-electro-mechanicalsystem Fabry–Perot cavity tunable filterarray for infrared hyperspectral imager".Applied Optics (2015). |
入库方式： OAI收割
来源：深圳先进技术研究院
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