The annealing effects on the micro-structure and properties of RuMoC films as seedless barrier for advanced Cu metallization
文献类型：期刊论文
| 作者 | Zou, Jianxiong; Liu, Bo; Jiao, Guohua; Lu, Yuanfu; Dong, Yuming; Li, Qiran |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2016 |
| 英文摘要 | 100 nm thick RuMoC films and 5 nm thick RuMoC films with Cu capping have been deposited on Si(111) by magnetron co-sputtering with Ru and MoC confocal targets. The samples were subsequently annealed at temperatures ranging from 450 to 650 C in vacuum at a pressure of 3 10 4 Pa to study the annealing effects on the microstructures and properties of RuMoC films for advanced seedless Cu metallization applications. The sheet resistances, residual oxygen contents, and microstructures of the RuMoC films have close correlation with the doping contents of Mo and C, which can be easily controlled by the deposition power ratio of MoC versus Ru targets (DPR). When DPR was 0.5, amorphous RuMoC film (marked as RuMoC II) with low sheet resistances and residual oxygen contents was obtained. The fundamental relationship between the annealing temperatures with the microstructures and properties of the RuMoC films was investigated, and a critical temperature point was revealed at about 550 C where the components and microstructures of the RuMoC II films changed obviously. Results indicated that below 550 C, the RuMoC II films remained amorphous due to the well-preserved C-Ru and C-Mo bonds. However, above 550 C, the microstructures of RuMoC II films transformed from amorphous to nano-composite structure due to the breakage of Ru-C bonds, while the supersaturated solid solution MoC segregated out along the grain boundaries of Ru, thus hindering the diffusion of Cu and O atoms. This is the main mechanism of the excellent thermal stability of the RuMoC films after annealing at high temperatures. The results indicated great prospects of amorphous RuMoC films in advanced seedless Cu metallization applications. |
| 收录类别 | SCI |
| 原文出处 | http://scitation.aip.org/docserver/fulltext/aip/journal/jap/120/9/1.4962011.pdf?expires=1476670066&id=id&accname=2113437&checksum=0F14BA5673E82C9C69D1A89709B7EF77 |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/9848]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 作者单位 | JOURNAL OF APPLIED PHYSICS |
| 推荐引用方式 GB/T 7714 | Zou, Jianxiong,Liu, Bo,Jiao, Guohua,et al. The annealing effects on the micro-structure and properties of RuMoC films as seedless barrier for advanced Cu metallization[J]. JOURNAL OF APPLIED PHYSICS,2016. |
| APA | Zou, Jianxiong,Liu, Bo,Jiao, Guohua,Lu, Yuanfu,Dong, Yuming,&Li, Qiran.(2016).The annealing effects on the micro-structure and properties of RuMoC films as seedless barrier for advanced Cu metallization.JOURNAL OF APPLIED PHYSICS. |
| MLA | Zou, Jianxiong,et al."The annealing effects on the micro-structure and properties of RuMoC films as seedless barrier for advanced Cu metallization".JOURNAL OF APPLIED PHYSICS (2016). |
入库方式： OAI收割
来源：深圳先进技术研究院
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