Low-Voltage Vibration Sensor in Standard CMOS Process
文献类型：会议论文
| 作者 | Benxian Peng ; Ting Yu ; Fengqi Yu |
| 出版日期 | 2007 |
| 会议名称 | IEEE International Conference on Robotics and Biomimetics (ROBIO 2007) |
| 会议地点 | Sanya, China |
| 英文摘要 | A novel micro-vibration sensor with MOS structure is proposed and two solutions to reduce high threshold voltage are developed. The proposedsensor exhibits prefect linearity up to 99.98% and high resolution of 0.19 μA/g. The vibration sensor can provide various potential applications, such as civil structural health monitoring, biomedical applications, low power consumption wireless sensor networks. The Sensor is designed with commercial standard 0.25 μm CMOS process followed by only one maskless post-CMOS step. Gas rarefaction effect in ultra-thin air gap is also discussed in this paper |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/2044]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 推荐引用方式 GB/T 7714 | Benxian Peng,Ting Yu,Fengqi Yu. Low-Voltage Vibration Sensor in Standard CMOS Process[C]. 见:IEEE International Conference on Robotics and Biomimetics (ROBIO 2007) . Sanya, China. |
入库方式： OAI收割
来源：深圳先进技术研究院
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