A high performance vibration sensor with extended floating gate
文献类型:会议论文
作者 | Benxian Peng; Ting Yu; Fengqi Yu; Yuchun Feng |
出版日期 | 2009 |
会议名称 | 2009 IEEE International Conference on Information and Automation, ICIA 2009 |
会议地点 | Changsha |
英文摘要 | A novel CMOS vibration sensor with extended floating gate is developed with simple circuitry to realize high sensitivity, linearity, and manufacturability. A method to enhance linearity by varying capacitance coupling coefficient relative to total capacitance is proposed. The sensorcan maintain linearity in a large displacement range and its measurement range also greatly increases (up to±33g). The sensor can achieve a resolution of 0.05g, obtained by ANSYS and HSPICE simulations. HSPICE models for time varying capacitance and floating gate are also proposed. The sensor has ultra low power consumption of only 824.3 ?W and may be able to operate with a single coin cell battery. |
收录类别 | EI |
语种 | 英语 |
源URL | [http://ir.siat.ac.cn:8080/handle/172644/2399] ![]() |
专题 | 深圳先进技术研究院_集成所 |
作者单位 | 2009 |
推荐引用方式 GB/T 7714 | Benxian Peng,Ting Yu,Fengqi Yu,et al. A high performance vibration sensor with extended floating gate[C]. 见:2009 IEEE International Conference on Information and Automation, ICIA 2009. Changsha. |
入库方式: OAI收割
来源:深圳先进技术研究院
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