Vibration Sensor with Floating Gate Based on Standard CMOS Process
文献类型：会议论文
| 作者 | Ting Yu; Benxian Peng; Fengqi Yu |
| 出版日期 | 2013 |
| 会议名称 | 2013 4th International Conference on Digital Manufacturing and Automation, ICDMA 2013 |
| 会议地点 | Qindao, Shandong, China |
| 英文摘要 | A vibration sensor with floating gate based on standard CMOS and post-CMOS processes is presented. The vibrating membrane is released with one simple metal sacrificial layer removal step, which is very cost-efficient and fully CMOS compatible, enabling monolithic integration of circuitry. Test results show that the proposed sensor can work properly, and have good frequency linearity with the test shaking system, which exhibits prefect linearity up to 99.94%. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/4511]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 作者单位 | 2013 |
| 推荐引用方式 GB/T 7714 | Ting Yu,Benxian Peng,Fengqi Yu. Vibration Sensor with Floating Gate Based on Standard CMOS Process[C]. 见:2013 4th International Conference on Digital Manufacturing and Automation, ICDMA 2013. Qindao, Shandong, China. |
入库方式： OAI收割
来源：深圳先进技术研究院
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